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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Glenn D. Boreman
  • Vol. 44, Iss. 30 — Oct. 20, 2005
  • pp: 6496–6505

Detection of sputtered metals with cavity ring-down spectroscopy

A. P. Yalin, V. Surla, M. Butweiller, and J. D. Williams  »View Author Affiliations


Applied Optics, Vol. 44, Issue 30, pp. 6496-6505 (2005)
http://dx.doi.org/10.1364/AO.44.006496


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Abstract

We report on use of cavity ring-down spectroscopy (CRDS) as a means to detect and quantify ion sputtering of refractory metal species. CRDS measurements are made with a neodymium:YAG-pumped optical parametric oscillator laser system in the 375–400 nm region. CRDS sputtering measurements are presented for argon ions incident on iron, aluminum, molybdenum, and titanium. The measurements are based on absorption from fine-structure levels of the electronic ground-state multiplets. For each species, characteristic spectra are provided, the dependence of sputtered particle number density on the beam current is examined, measured densities are compared with a sputter model, and detection limits are determined. For iron, aluminum, and titanium we probe multiple fine-structure levels within the ground-state multiplet and obtain information on their relative populations.

© 2005 Optical Society of America

OCIS Codes
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.6780) Instrumentation, measurement, and metrology : Temperature
(300.1030) Spectroscopy : Absorption

ToC Category:
Spectroscopy

History
Original Manuscript: February 22, 2005
Revised Manuscript: June 1, 2005
Manuscript Accepted: June 13, 2005
Published: October 20, 2005

Citation
A. P. Yalin, V. Surla, M. Butweiller, and J. D. Williams, "Detection of sputtered metals with cavity ring-down spectroscopy," Appl. Opt. 44, 6496-6505 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-30-6496

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