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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Glenn D. Boreman
  • Vol. 44, Iss. 32 — Nov. 10, 2005
  • pp: 6857–6860

Fabrication of alignment structures for a fiber resonator by use of deep-ultraviolet lithography

Xiyuan Liu, Karl-Heinz Brenner, Marco Wilzbach, Michael Schwarz, Thomas Fernholz, and Jörg Schmiedmayer  »View Author Affiliations


Applied Optics, Vol. 44, Issue 32, pp. 6857-6860 (2005)
http://dx.doi.org/10.1364/AO.44.006857


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Abstract

We present a novel method to mount and align an optical-fiber-based resonator on the flat surface of an atom chip with ultrahigh precision. The structures for mounting a pair of fibers, which constitute the fiber resonator, are produced by a spin-coated SU-8 photoresist technique by use of deep-UV lithography. The design and production of the SU-8 structures are discussed. From the measured finesses we calculate the coupling loss of the SU-8 structures acting as a kind of fiber splice to be smaller than 0.013 dB.

© 2005 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(230.4000) Optical devices : Microstructure fabrication
(270.5570) Quantum optics : Quantum detectors

ToC Category:
Integrated Optics

Citation
Xiyuan Liu, Karl-Heinz Brenner, Marco Wilzbach, Michael Schwarz, Thomas Fernholz, and Jörg Schmiedmayer, "Fabrication of alignment structures for a fiber resonator by use of deep-ultraviolet lithography," Appl. Opt. 44, 6857-6860 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-32-6857


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References

  1. R. Folman, P. Krüger, J. Schmiedmayer, J. Denschlag, and C. Henkel, "Microscopic atom optics: from wires to an atom chip," Adv. At. Mol. Opt. Phys. 48, 263-356 (2002).
  2. R. Folman, P. Krüger, D. Cassettari, B. Hessmo, T. Maier, and J. Schmiedmayer, "Controlling cold atoms using nanofabricated surfaces: atom chips," Phys. Rev. Lett. 84, 4749-4752 (2000). [CrossRef]
  3. P. Horak, B. G. Klappauf, A. Haase, R. Folman, J. Schmiedmayer, P. Domokos, and E. A. Hinds, "Possibility of single-atom detection on a chip," Phys. Rev. A 67, 043806 (2003).
  4. Microchem, http://www.microchem.com, NANO SU-8 50; the SU-8 photoresist for MEMS, http://aveclafaux.freeservers.com/SU-8.html.
  5. R. Ruhmann, K. Pfeiffer, M. Falenski, F. Reuther, R. Engelke, and G. Grützner, "SU-8: a high performance material for MEMS applications," Polymers in MEMS, http://www.microchem.com/resources/toklowbarebeamlowbarresist.pdf.
  6. M. Wilzbach, Physikalisches Institut der Universität Heidelberg, Philosophenweg 12, D-69120 Heidelberg, Germany, is preparing a manuscript to be called "Building microcavities with optical fibers for single atom detection."
  7. W. Demtröder, Laser Spectroscopy (Springer-Verlag, 2003).
  8. A. E. Siegman, Lasers (University Science, 1986).
  9. M. Saruwatari and K. Nawate, "Semiconductor laser to single-mode fiber coupler," Appl. Opt. 18, 1847-1856 (1979).
  10. A. Ghatak and K. Thyagarajan, Introduction to Fiber Optics (Cambridge Univ. Press, 1998).

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