We present a novel method to mount and align an optical-fiber-based resonator on the flat surface of an atom chip with ultrahigh precision. The structures for mounting a pair of fibers, which constitute the fiber resonator, are produced by a spin-coated SU-8 photoresist technique by use of deep-UV lithography. The design and production of the SU-8 structures are discussed. From the measured finesses we calculate the coupling loss of the SU-8 structures acting as a kind of fiber splice to be smaller than 0.013 dB.
© 2005 Optical Society of America
Xiyuan Liu, Karl-Heinz Brenner, Marco Wilzbach, Michael Schwarz, Thomas Fernholz, and Jörg Schmiedmayer, "Fabrication of alignment structures for a fiber resonator by use of deep-ultraviolet lithography," Appl. Opt. 44, 6857-6860 (2005)