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Applied Optics

Applied Optics


  • Editor: Glenn D. Boreman
  • Vol. 44, Iss. 32 — Nov. 10, 2005
  • pp: 6857–6860

Fabrication of alignment structures for a fiber resonator by use of deep-ultraviolet lithography

Xiyuan Liu, Karl-Heinz Brenner, Marco Wilzbach, Michael Schwarz, Thomas Fernholz, and Jörg Schmiedmayer  »View Author Affiliations

Applied Optics, Vol. 44, Issue 32, pp. 6857-6860 (2005)

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We present a novel method to mount and align an optical-fiber-based resonator on the flat surface of an atom chip with ultrahigh precision. The structures for mounting a pair of fibers, which constitute the fiber resonator, are produced by a spin-coated SU-8 photoresist technique by use of deep-UV lithography. The design and production of the SU-8 structures are discussed. From the measured finesses we calculate the coupling loss of the SU-8 structures acting as a kind of fiber splice to be smaller than 0.013 dB.

© 2005 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(230.4000) Optical devices : Microstructure fabrication
(270.5570) Quantum optics : Quantum detectors

ToC Category:
Integrated Optics

Original Manuscript: January 12, 2005
Revised Manuscript: March 15, 2005
Manuscript Accepted: March 17, 2005
Published: November 10, 2005

Xiyuan Liu, Karl-Heinz Brenner, Marco Wilzbach, Michael Schwarz, Thomas Fernholz, and Jörg Schmiedmayer, "Fabrication of alignment structures for a fiber resonator by use of deep-ultraviolet lithography," Appl. Opt. 44, 6857-6860 (2005)

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  1. R. Folman, P. Krüger, J. Schmiedmayer, J. Denschlag, C. Henkel, “Microscopic atom optics: from wires to an atom chip,” Adv. At. Mol. Opt. Phys. 48, 263–356 (2002). [CrossRef]
  2. R. Folman, P. Krüger, D. Cassettari, B. Hessmo, T. Maier, J. Schmiedmayer, “Controlling cold atoms using nanofabricated surfaces: atom chips,” Phys. Rev. Lett. 84, 4749–4752 (2000). [CrossRef] [PubMed]
  3. P. Horak, B. G. Klappauf, A. Haase, R. Folman, J. Schmiedmayer, P. Domokos, E. A. Hinds, “Possibility of single-atom detection on a chip,” Phys. Rev. A 67, 043806 (2003). [CrossRef]
  4. Microchem, http://www.microchem.com , NANO SU-8 50;the SU-8 photoresist for MEMS, http://aveclafaux.freeservers.com/SU-8.html .
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  6. M. Wilzbach, Physikalisches Institut der Universität Heidelberg, Philosophenweg 12, D-69120 Heidelberg, Germany, is preparing a manuscript to be called“Building microcavities with optical fibers for single atom detection.”
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  8. A. E. Siegman, Lasers (University Science, 1986).
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  10. A. Ghatak, K. Thyagarajan, Introduction to Fiber Optics (Cambridge Univ. Press, 1998). [CrossRef]

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