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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Glenn D. Boreman
  • Vol. 44, Iss. 32 — Nov. 10, 2005
  • pp: 6857–6860

Fabrication of alignment structures for a fiber resonator by use of deep-ultraviolet lithography

Xiyuan Liu, Karl-Heinz Brenner, Marco Wilzbach, Michael Schwarz, Thomas Fernholz, and Jörg Schmiedmayer  »View Author Affiliations


Applied Optics, Vol. 44, Issue 32, pp. 6857-6860 (2005)
http://dx.doi.org/10.1364/AO.44.006857


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Abstract

We present a novel method to mount and align an optical-fiber-based resonator on the flat surface of an atom chip with ultrahigh precision. The structures for mounting a pair of fibers, which constitute the fiber resonator, are produced by a spin-coated SU-8 photoresist technique by use of deep-UV lithography. The design and production of the SU-8 structures are discussed. From the measured finesses we calculate the coupling loss of the SU-8 structures acting as a kind of fiber splice to be smaller than 0.013 dB.

© 2005 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(230.4000) Optical devices : Microstructure fabrication
(270.5570) Quantum optics : Quantum detectors

ToC Category:
Integrated Optics

History
Original Manuscript: January 12, 2005
Revised Manuscript: March 15, 2005
Manuscript Accepted: March 17, 2005
Published: November 10, 2005

Citation
Xiyuan Liu, Karl-Heinz Brenner, Marco Wilzbach, Michael Schwarz, Thomas Fernholz, and Jörg Schmiedmayer, "Fabrication of alignment structures for a fiber resonator by use of deep-ultraviolet lithography," Appl. Opt. 44, 6857-6860 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-32-6857

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