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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Glenn D. Boreman
  • Vol. 44, Iss. 32 — Nov. 10, 2005
  • pp: 6861–6868

Analysis of a micropolarizer array-based simultaneous phase-shifting interferometer

Matt Novak, James Millerd, Neal Brock, Michael North-Morris, John Hayes, and James Wyant  »View Author Affiliations


Applied Optics, Vol. 44, Issue 32, pp. 6861-6868 (2005)
http://dx.doi.org/10.1364/AO.44.006861


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Abstract

Recent technological innovations have enabled the development of a new class of dynamic (vibration-insensitive) interferometer based on a CCD pixel-level phase-shifting approach. We present theoretical and experimental results for an interferometer based on this pixelated phase-shifting technique. Analyses of component errors and instrument functionality are presented. We show that the majority of error sources cause relatively small magnitude peak-to-valley errors in measurement of the order of 0.002–0.005λ. These errors are largely mitigated by high-rate data acquisition and consequent data averaging.

© 2005 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

ToC Category:
Interferometry

History
Original Manuscript: January 12, 2005
Revised Manuscript: May 18, 2005
Manuscript Accepted: June 27, 2005
Published: November 10, 2005

Citation
Matt Novak, James Millerd, Neal Brock, Michael North-Morris, John Hayes, and James Wyant, "Analysis of a micropolarizer array-based simultaneous phase-shifting interferometer," Appl. Opt. 44, 6861-6868 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-32-6861

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