Abstract
Weighted averaging of a sequence of phase-shifted interference patterns yields a fringe-free intensity image that can be useful for machine vision, lateral metrology, defect detection, and other supplementary tasks in a surface-profiling interferometer. Coefficients for effective fringe-removal algorithms follow from a Fourier analysis of phase-shifting errors. Theoretical and experimental examples illustrate the substantially improved performance of a well-designed weighted average over a simple linear sum of data frames.
© 2005 Optical Society of America
Full Article | PDF ArticleMore Like This
Peter de Groot
Appl. Opt. 34(22) 4723-4730 (1995)
Leslie L. Deck
Appl. Opt. 48(20) 3948-3960 (2009)
Gastón A. Ayubi, J. Matías Di Martino, Julia R. Alonso, Ariel Fernández, César D. Perciante, and José A. Ferrari
Appl. Opt. 50(2) 147-154 (2011)