Photonic devices based on preferential etching
Applied Optics, Vol. 44, Issue 33, pp. 7181-7186 (2005)
http://dx.doi.org/10.1364/AO.44.007181
Acrobat PDF (686 KB)
Abstract
We introduce a design concept of optical waveguides characterized by a practical and reproducible process based on preferential etching of crystalline silicon substrates. Low-loss waveguides, spot-size converters, and power dividers have been obtained with polymers. We have also aligned liquid crystals in the waveguides and demonstrated guided propagation. Therefore this technology is a suitable platform for soft-matter photonics and heterogeneous integration.
© 2005 Optical Society of America
OCIS Codes
(160.3710) Materials : Liquid crystals
(160.5470) Materials : Polymers
(160.6000) Materials : Semiconductor materials
(230.4000) Optical devices : Microstructure fabrication
(230.7370) Optical devices : Waveguides
(250.5300) Optoelectronics : Photonic integrated circuits
ToC Category:
Materials
Citation
Bob Bellini, Jean-François Larchanché, Jean-Pierre Vilcot, Didier Decoster, Romeo Beccherelli, and Antonio d'Alessandro, "Photonic devices based on preferential etching," Appl. Opt. 44, 7181-7186 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-33-7181
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Properties of photonic crystal fiber and the effective index model (JOSAA)
- Chielectric relaxation: chromophore dynamics in an azo-dye-doped polymer (JOSAB)
- PMMA quantum dots composites fabricated via use of pre-polymerization (OE)
- Observation of light propagation across a 90° corner in chains of microspheres on a patterned substrate (OL)
- Optical and compositional properties of amorphous silicon-germanium films by plasma processing for integrated photonics (OME)
Related Conference Papers
- Semiconductor quantum computer design with 100 nm separation of nuclear-spin qubits
- Semiconductor quantum computer design with 100 nm separation of nuclear-spin qubits
- Near-Field Scanning Optical Microscopy of Femtosecond Laser Written Waveguides
- Flatband Slow Light in Photonic Crystal Waveguides
- Photonic Crystal Lens for Photonic Crystal Waveguide Coupling
- Second-harmonic generation in nonpolar chiral materials: relationship between molecular and macroscopic properties
- Second-harmonic generation in nonpolar chiral materials: relationship between molecular and macroscopic properties
« Previous Article | Next Article »
OSA is a member of 