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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Glenn D. Boreman
  • Vol. 44, Iss. 34 — Dec. 1, 2005
  • pp: 7475–7482

Fabrication of subwavelength structure for improvement in light-extraction efficiency of light-emitting devices using a self-assembled pattern of block copolymer

Koji Asakawa and Akira Fujimoto  »View Author Affiliations


Applied Optics, Vol. 44, Issue 34, pp. 7475-7482 (2005)
http://dx.doi.org/10.1364/AO.44.007475


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Abstract

A new fabrication method to improve the optical extraction efficiency of light-emitting devices is presented. The morphology of a self-assembled block copolymer was transferred to the surface of a compound semiconductor to achieve a subwavelength columnar structure. The optical extraction efficiency of the substrates with subwavelength columnar structures of 350 nm pillar height, 130 nm diameter, and 180 nm pitch, improved 2.2 times compared to unprocessed substrates. This method does not require expensive exposure lithography tools and is therefore suitable for conventional semiconductor processes.

© 2005 Optical Society of America

OCIS Codes
(220.3740) Optical design and fabrication : Lithography
(230.1950) Optical devices : Diffraction gratings
(230.3670) Optical devices : Light-emitting diodes
(230.4000) Optical devices : Microstructure fabrication
(240.6700) Optics at surfaces : Surfaces

ToC Category:
Optical Devices

History
Original Manuscript: April 18, 2005
Revised Manuscript: June 30, 2005
Manuscript Accepted: July 1, 2005
Published: December 1, 2005

Citation
Koji Asakawa and Akira Fujimoto, "Fabrication of subwavelength structure for improvement in light-extraction efficiency of light-emitting devices using a self-assembled pattern of block copolymer," Appl. Opt. 44, 7475-7482 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-34-7475

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