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Applied Optics

Applied Optics


  • Editor: Glenn D. Boreman
  • Vol. 44, Iss. 36 — Dec. 20, 2005
  • pp: 7735–7743

High-temperature stability multilayers for extreme-ultraviolet condenser optics

Saša Bajt and Daniel G. Stearns  »View Author Affiliations

Applied Optics, Vol. 44, Issue 36, pp. 7735-7743 (2005)

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We investigate the thermal stability of Mo/SiC multilayer coatings at elevated temperatures. Transmission electron microscopy and x-ray diffraction studies show that, upon annealing, a thermally induced structural relaxation occurs that transforms the polycrystalline Mo and amorphous SiC layers in as-deposited multilayers into an amorphous Mo-Si-C alloy and crystalline SiC, respectively. After this relaxation process is complete, the multilayer is stable at temperatures up to 400 °C.

© 2005 Optical Society of America

OCIS Codes
(110.3960) Imaging systems : Microlithography
(310.0310) Thin films : Thin films
(340.7470) X-ray optics : X-ray mirrors

ToC Category:
Thin Films

Original Manuscript: May 13, 2005
Manuscript Accepted: August 23, 2005
Published: December 20, 2005

Saša Bajt and Daniel G. Stearns, "High-temperature stability multilayers for extreme-ultraviolet condenser optics," Appl. Opt. 44, 7735-7743 (2005)

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