OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Glenn D. Boreman
  • Vol. 44, Iss. 36 — Dec. 20, 2005
  • pp: 7735–7743

High-temperature stability multilayers for extreme-ultraviolet condenser optics

Saša Bajt and Daniel G. Stearns  »View Author Affiliations


Applied Optics, Vol. 44, Issue 36, pp. 7735-7743 (2005)
http://dx.doi.org/10.1364/AO.44.007735


View Full Text Article

Enhanced HTML    Acrobat PDF (1121 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We investigate the thermal stability of Mo/SiC multilayer coatings at elevated temperatures. Transmission electron microscopy and x-ray diffraction studies show that, upon annealing, a thermally induced structural relaxation occurs that transforms the polycrystalline Mo and amorphous SiC layers in as-deposited multilayers into an amorphous Mo-Si-C alloy and crystalline SiC, respectively. After this relaxation process is complete, the multilayer is stable at temperatures up to 400 °C.

© 2005 Optical Society of America

OCIS Codes
(110.3960) Imaging systems : Microlithography
(310.0310) Thin films : Thin films
(340.7470) X-ray optics : X-ray mirrors

ToC Category:
Thin Films

History
Original Manuscript: May 13, 2005
Manuscript Accepted: August 23, 2005
Published: December 20, 2005

Citation
Saša Bajt and Daniel G. Stearns, "High-temperature stability multilayers for extreme-ultraviolet condenser optics," Appl. Opt. 44, 7735-7743 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-36-7735

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited