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Applied Optics

Applied Optics


  • Vol. 44, Iss. 7 — Mar. 1, 2005
  • pp: 1178–1181

Versatile micromirror with a multimovement mode

Hongbin Yu, Haiqing Chen, and Sai Fu  »View Author Affiliations

Applied Optics, Vol. 44, Issue 7, pp. 1178-1181 (2005)

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A 3 × 3 micromirror array has been designed and successfully fabricated by multilayer silicon surface micromaching technology. It is composed of a bottom electrode, a supporting part, and a mirror plate and can modulate both phase and amplitude of incident light. The maximum deflection length along the vertical direction of the mirror plate is 2 μm, and the rotation angles about the Y and X axes are ×2.3° and ±1.45°, respectively; one can obtain an even larger deflection by simply increasing the thickness of the sacrificial layers.

© 2005 Optical Society of America

OCIS Codes
(230.4000) Optical devices : Microstructure fabrication
(230.4040) Optical devices : Mirrors
(350.3950) Other areas of optics : Micro-optics

Original Manuscript: April 8, 2004
Revised Manuscript: October 21, 2004
Manuscript Accepted: October 23, 2004
Published: March 1, 2005

Hongbin Yu, Haiqing Chen, and Sai Fu, "Versatile micromirror with a multimovement mode," Appl. Opt. 44, 1178-1181 (2005)

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