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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 44, Iss. 7 — Mar. 1, 2005
  • pp: 1178–1181

Versatile micromirror with a multimovement mode

Hongbin Yu, Haiqing Chen, and Sai Fu  »View Author Affiliations


Applied Optics, Vol. 44, Issue 7, pp. 1178-1181 (2005)
http://dx.doi.org/10.1364/AO.44.001178


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Abstract

A 3 × 3 micromirror array has been designed and successfully fabricated by multilayer silicon surface micromaching technology. It is composed of a bottom electrode, a supporting part, and a mirror plate and can modulate both phase and amplitude of incident light. The maximum deflection length along the vertical direction of the mirror plate is 2 μm, and the rotation angles about the Y and X axes are ×2.3° and ±1.45°, respectively; one can obtain an even larger deflection by simply increasing the thickness of the sacrificial layers.

© 2005 Optical Society of America

OCIS Codes
(230.4000) Optical devices : Microstructure fabrication
(230.4040) Optical devices : Mirrors
(350.3950) Other areas of optics : Micro-optics

History
Original Manuscript: April 8, 2004
Revised Manuscript: October 21, 2004
Manuscript Accepted: October 23, 2004
Published: March 1, 2005

Citation
Hongbin Yu, Haiqing Chen, and Sai Fu, "Versatile micromirror with a multimovement mode," Appl. Opt. 44, 1178-1181 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-7-1178


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References

  1. J. M. Younse, “Projection display systems based on the digital micromirror device (DMD),” in Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications, W. Bailey, M. E. Motamedi, F. C. Luo, eds., Proc. SPIE2641, 64–75 (1995). [CrossRef]
  2. M. H. Kiang, O. Solgaard, K. Y. Lau, R. S. Muller, “Electrostatic comb drive-actuated micromirrors for laser-beam scanning and positioning,” J. Microelectromech. Syst. 7, 27–37 (1998). [CrossRef]
  3. H. Toshiyoshi, H. Fujita, “Electrostatic microtorsion mirrors for an optical switch matrix,” J. Microelectromech. Syst. 5, 231–237 (1996). [CrossRef]
  4. R. A. Miller, Y. C. Tai, G. Xu, “An electromagnetic MEMS 2 × 22 fiber optic bypass switch,” presented at the IEEE Ninth International Conference on Solid-State Sensors and Actuators (Transducers 97), Chicago, Ill., 16–19 June 1997.
  5. J. E. Pearson, S. Hansen, “Experimental studies of a deformable-mirror adaptive optical system,” J. Opt. Soc. Am. 67, 325–333 (1977). [CrossRef]
  6. M. Horenstein, T. Bifano, S. Pappas, J. Perreault, R. Krishnamoorthyl, “Real-time optical correction using electrostatically actuated MEMS devices,” J. Electrost. 46, 91–101 (1999). [CrossRef]
  7. T. Bifano, J. Perreault, R. Krishnamoorthyl, M. Horenstein, “Microelectromechanical deformable mirrors,” J. Sel. Top. Quantum Electron. 5, 83–89 (1999). [CrossRef]
  8. Y. H. Min, Y. K. Kim, “Modeling, design, fabrication and measurement of a single layer polysilicon micromirror with initial curvature compensation,” Sens. Actuators 78, 8–17 (1999). [CrossRef]
  9. S. W. Chung, J. W. Shin, Y. K. Kim, Y. H. Min, “Characteristics measurements of the 100 × 100 fabricated micromirror,” in Advanced Applications of Lasers in Materials Processing, IEEE/LEOS 1996 Summer Topical Meetings (Institute of Electrical and Electronics Engineers, Piscataway, N.J., 1996), pp. 3–4.

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