Grating projection system for surface contour measurement
Applied Optics, Vol. 44, Issue 8, pp. 1393-1400 (2005)
http://dx.doi.org/10.1364/AO.44.001393
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Abstract
A grating projection system is a low-cost surface contour measurement technique that can be applied to a wide range of applications. There has been a resurgence of interest in the technique in recent years because of developments in computer hardware and image processing algorithms. We describe a method that projects a phase-shifted grating through a lens on an object surface. The deformed grating image on the object surface is captured by a CCD camera for subsequent analysis. Phase variation is achieved by a linear translation stage on which the grating is mounted. We compare the experimental results with the test results using a mechanical stylus method.
© 2005 Optical Society of America
OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
Citation
Cho Jui Tay, Madhuri Thakur, and Chenggen Quan, "Grating projection system for surface contour measurement," Appl. Opt. 44, 1393-1400 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-8-1393
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