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Applied Optics

Applied Optics


  • Vol. 44, Iss. 8 — Mar. 10, 2005
  • pp: 1449–1453

Nanometric position and displacement measurement of the six degrees of freedom by means of a patterned surface element

Patrick Sandoz  »View Author Affiliations

Applied Optics, Vol. 44, Issue 8, pp. 1449-1453 (2005)

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A method is presented for position and displacement measurements of the six degrees of freedom by use of a patterned surface element observed by a static interferometric vision system. The surface element is made of a regular pattern of circular holes etched on a chromium layer deposited onto a flat glass plate. The in-plane coordinates (x, y, θz) are reconstructed with a subpixel resolution by a vision method based on phase measurements. The out-of-plane coordinates (z, θx, θy) are reconstructed by phase-shifting interferometry. Resolutions achieved by the proposed method are in the range of microradians for the measurement of angles and of nanometers for the position and displacement.

© 2005 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(150.0150) Machine vision : Machine vision
(150.6910) Machine vision : Three-dimensional sensing

Original Manuscript: July 28, 2004
Revised Manuscript: October 15, 2004
Manuscript Accepted: October 20, 2004
Published: March 10, 2005

Patrick Sandoz, "Nanometric position and displacement measurement of the six degrees of freedom by means of a patterned surface element," Appl. Opt. 44, 1449-1453 (2005)

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