Photolithographic fabrication of a high-precision bar-code pattern on the surface of a sphere
Applied Optics, Vol. 44, Issue 9, pp. 1538-1542 (2005)
http://dx.doi.org/10.1364/AO.44.001538
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Abstract
Bar-code patterns were produced upon gold-coated glass spheres 8 mm in diameter with a novel projection photolithography exposure system that included a computer-controlled rotation stage-and-shutter arrangement. The patterns extended in an equatorial band about the entire 360° periphery of the sphere. To obtain uniform thickness of the photoresist layer, we dip coated the spheres and removed the excess with an absorption pad. The widths of the bars in the pattern were in the range 21.85 ± 0.6 µm at the equator, and the relative error in the angular position of the pattern features was less than 0.025°. The patterned spheres are suitable for use in optically interrogated flying spot magnetic heading sensors.
© 2005 Optical Society of America
OCIS Codes
(110.0110) Imaging systems : Imaging systems
(110.3960) Imaging systems : Microlithography
(110.5220) Imaging systems : Photolithography
Citation
Kyongtae Park, Robert A. Atkins, Henry F. Taylor, James N. Gardner, and Chung E. Lee, "Photolithographic fabrication of a high-precision bar-code pattern on the surface of a sphere," Appl. Opt. 44, 1538-1542 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-9-1538
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