Topography characterization of a deep grating using near-field imaging
Applied Optics, Vol. 45, Issue 1, pp. 117-121 (2006)
http://dx.doi.org/10.1364/AO.45.000117
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Abstract
Using near-field optical microscopy at the wavelength of
© 2006 Optical Society of America
OCIS Codes
(100.3190) Image processing : Inverse problems
(180.5810) Microscopy : Scanning microscopy
ToC Category:
Diffractive Optics
Citation
Niels Gregersen, Bjarne Tromborg, Valentyn S. Volkov, Sergey I. Bozhevolnyi, and Johan Holm, "Topography characterization of a deep grating using near-field imaging," Appl. Opt. 45, 117-121 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-1-117
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