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Applied Optics

Applied Optics


  • Vol. 45, Iss. 1 — Jan. 1, 2006
  • pp: 117–121

Topography characterization of a deep grating using near-field imaging

Niels Gregersen, Bjarne Tromborg, Valentyn S. Volkov, Sergey I. Bozhevolnyi, and Johan Holm  »View Author Affiliations

Applied Optics, Vol. 45, Issue 1, pp. 117-121 (2006)

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Using near-field optical microscopy at the wavelength of 633 nm , we image light intensity distributions at several distances above an 2 - μm - deep and a 1 - μm - period glass grating illuminated from below under the condition of total internal reflection. The intensity distributions are numerically modeled, and an inversion procedure based on a least-squares-fit optimization is employed to extract the grating geometry from the optical images.

© 2006 Optical Society of America

OCIS Codes
(100.3190) Image processing : Inverse problems
(180.5810) Microscopy : Scanning microscopy

Niels Gregersen, Bjarne Tromborg, Valentyn S. Volkov, Sergey I. Bozhevolnyi, and Johan Holm, "Topography characterization of a deep grating using near-field imaging," Appl. Opt. 45, 117-121 (2006)

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