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Topography characterization of a deep grating using near-field imaging

Niels Gregersen, Bjarne Tromborg, Valentyn S. Volkov, Sergey I. Bozhevolnyi, and Johan Holm

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Abstract

Using near-field optical microscopy at the wavelength of 633nm, we image light intensity distributions at several distances above an ∼2-μm-deep and a 1-μm-period glass grating illuminated from below under the condition of total internal reflection. The intensity distributions are numerically modeled, and an inversion procedure based on a least-squares-fit optimization is employed to extract the grating geometry from the optical images.

© 2006 Optical Society of America

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