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Applied Optics

Applied Optics


  • Vol. 45, Iss. 1 — Jan. 1, 2006
  • pp: 178–183

Highly reflecting aluminum-protected optical coatings for the vacuum-ultraviolet spectral range

Minghong Yang, Alexandre Gatto, and Norbert Kaiser  »View Author Affiliations

Applied Optics, Vol. 45, Issue 1, pp. 178-183 (2006)

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We discuss the approaches to preserve the high-reflectance aluminum mirror for the vacuum-ultraviolet spectral region. Single fluoride and oxide layers, a homogeneous multilayer, and hybrid multilayer solutions are put forward. Single fluoride and oxide materials have achieved reflectance above 90% at 193   nm . Multilayer capping can provide reflectance of 93.4% at 193   nm , and a hybrid multilayer of fluoride and oxide can achieve reflectance above 90 %   to   160   nm .

© 2006 Optical Society of America

OCIS Codes
(260.7210) Physical optics : Ultraviolet, vacuum
(310.1620) Thin films : Interference coatings
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Thin Films

Minghong Yang, Alexandre Gatto, and Norbert Kaiser, "Highly reflecting aluminum-protected optical coatings for the vacuum-ultraviolet spectral range," Appl. Opt. 45, 178-183 (2006)

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