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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 45, Iss. 10 — Apr. 1, 2006
  • pp: 2246–2250

Study of a dual-frequency laser interferometer with unique optical subdivision techniques

Zhaogu Cheng, Haijun Gao, Zhiping Zhang, Huijie Huang, and Jianqiang Zhu  »View Author Affiliations

Applied Optics, Vol. 45, Issue 10, pp. 2246-2250 (2006)

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A dual-frequency laser interferometer has been developed based on a low-performance commercial interferometer. An optical resolution of 1.24 ‚ÄČ nm and a nanometer-scale accuracy have been achieved by using unique techniques to obtain an optical subdivision factor of 1 / 8 . A method for reducing static positioning errors was also shown. The measurement of a free-falling body was performed to test the maximum achievable target velocity of the device. The experimental setup for measuring the static positioning errors was also given. The new interferometer could be widely used in nanometer-scale fabrications and measurements.

© 2006 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(220.3740) Optical design and fabrication : Lithography
(220.4610) Optical design and fabrication : Optical fabrication

ToC Category:
Photon Correlation and Scattering

Original Manuscript: June 16, 2005
Revised Manuscript: November 29, 2005
Manuscript Accepted: December 6, 2005

Zhaogu Cheng, Haijun Gao, Zhiping Zhang, Huijie Huang, and Jianqiang Zhu, "Study of a dual-frequency laser interferometer with unique optical subdivision techniques," Appl. Opt. 45, 2246-2250 (2006)

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