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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 45, Iss. 11 — Apr. 10, 2006
  • pp: 2404–2408

Spin-on-glass coatings for the generation of superpolished substrates for use in the extreme-ultraviolet region

Farhad Salmassi, Patrick P. Naulleau, and Eric M. Gullikson  »View Author Affiliations

Applied Optics, Vol. 45, Issue 11, pp. 2404-2408 (2006)

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Substrates intended for use as extreme-ultraviolet (EUV) optics have extremely stringent requirements in terms of finish. These requirements can dramatically increase the cost and fabrication time, especially when nonconventional shapes, such as toroids, are required. Here we present a spin-on-glass resist process capable of generating superpolished parts from inexpensive substrates. The method has been used to render diamond-turned substrates compatible for use as EUV optics. Toroidal diamond-turned optics with starting rms roughness in the 3.3 3.7   nm range have been smoothed to the 0.4 0 . 6 n m range. EUV reflectometry characterization of these optics has demonstrated reflectivities of approximately 65 % .

© 2006 Optical Society of America

OCIS Codes
(220.1920) Optical design and fabrication : Diamond machining
(220.5450) Optical design and fabrication : Polishing
(230.4040) Optical devices : Mirrors
(230.4170) Optical devices : Multilayers
(310.1620) Thin films : Interference coatings
(340.7470) X-ray optics : X-ray mirrors

Original Manuscript: September 13, 2005
Manuscript Accepted: November 20, 2005

Farhad Salmassi, Patrick P. Naulleau, and Eric M. Gullikson, "Spin-on-glass coatings for the generation of superpolished substrates for use in the extreme-ultraviolet region," Appl. Opt. 45, 2404-2408 (2006)

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  1. R. Stulen and D. Sweeney, "Extreme ultraviolet lithography," IEEE J. Quantum Electron. 35, 694-699 (1999). [CrossRef]
  2. H. Meiling, J. Benschop, R. Hartman, P. Kürz, P. Hoghoj, R. Geyl, and N. Harned, "EXSTATIC: ASML's a-tool development for EUVL," in Emerging Lithographic Technologies VI, R.L.Engelstad, ed., Proc. SPIE 4688, 1-10 (2002).
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  9. The copper diamond-turned optic was manufactured by RPM Opto Electronics, Santa Rosa, Calif.
  10. The aluminum diamond-turned optic was manufactured by Nu-Tek Precision Optical Corporation, Aberdeen, Md.
  11. J. H. Underwood, E. M. Gullikson, M. Koike, P. J. Batson, P. E. Denham, K. D. Franck, R. E. Tackaberry, and W. F. Steele, Rev. Sci. Instrum. 9, 1-5 (1996).
  12. ZYGO Corporation, Middlefield, Conn.

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