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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 45, Iss. 13 — May. 1, 2006
  • pp: 3097–3105

Optimization of deposition uniformity for large-aperture National Ignition Facility substrates in a planetary rotation system

James B. Oliver and David Talbot  »View Author Affiliations

Applied Optics, Vol. 45, Issue 13, pp. 3097-3105 (2006)

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Multilayer coatings on large substrates with increasingly complex spectral requirements are essential for a number of optical systems, placing stringent requirements on the error tolerances of individual layers. Each layer must be deposited quite uniformly over the entire substrate surface since any nonuniformity will add to the layer-thickness error level achieved. A deposition system containing a planetary rotation system with stationary uniformity masking is modeled, with refinements of the planetary gearing, source placement, and uniformity mask shape being utilized to achieve an optimal configuration. The impact of improper planetary gearing is demonstrated theoretically, as well as experimentally, providing more comprehensive requirements than simply avoiding repetition of previous paths through the vapor plume, until all possible combinations of gear teeth have been used. Deposition efficiency and the impact of changing vapor plume conditions on the uniformity achieved are used to validate improved source placement. Uniformity measurements performed on a mapping laser photometer demonstrate nonuniformities of less than 0.5 % for 0.75   m optics in a 72   in. ( 1.8 m ) coating chamber.

© 2006 Optical Society of America

OCIS Codes
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication
(310.3840) Thin films : Materials and process characterization
(310.6870) Thin films : Thin films, other properties

ToC Category:
Thin Films

Original Manuscript: February 28, 2005
Manuscript Accepted: June 27, 2005

James B. Oliver and David Talbot, "Optimization of deposition uniformity for large-aperture National Ignition Facility substrates in a planetary rotation system," Appl. Opt. 45, 3097-3105 (2006)

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