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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 45, Iss. 14 — May. 10, 2006
  • pp: 3201–3212

Profiles of a high-aspect-ratio grating determined by spectroscopic scatterometry and atomic-force microscopy

J. Garnaes, P.-E. Hansen, N. Agersnap, J. Holm, F. Borsetto, and A. Kühle  »View Author Affiliations


Applied Optics, Vol. 45, Issue 14, pp. 3201-3212 (2006)
http://dx.doi.org/10.1364/AO.45.003201


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Abstract

The new and fast scatterometry method called optical diffraction microscopy is compared with atomic-force microscopy by use of cross-section scanning-electron microscope images as references. The sample is a high-aspect-ratio grating with a period of 1000   nm . To allow the atomic-force microscope to track all parts of the grating profile, the grating is investigated at different tilt angles. The measured quantities of the profile include sidewall angle γ ( 90 ° ) , groove height h ( 2000   nm ) , and degree of filling f ( 40 % ) . The two methods, which respond to quite different material properties, give consistent results within standard uncertainties of u ( γ ) 0.8 ° , u ( h ) 15   nm , and u ( f ) 1 % .

© 2006 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(050.1960) Diffraction and gratings : Diffraction theory
(050.2770) Diffraction and gratings : Gratings
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology

History
Original Manuscript: June 20, 2005
Revised Manuscript: November 30, 2005
Manuscript Accepted: December 3, 2005

Citation
J. Garnaes, P.-E. Hansen, N. Agersnap, J. Holm, F. Borsetto, and A. Kühle, "Profiles of a high-aspect-ratio grating determined by spectroscopic scatterometry and atomic-force microscopy," Appl. Opt. 45, 3201-3212 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-14-3201


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