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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 45, Iss. 14 — May. 10, 2006
  • pp: 3325–3330

Absolute measurement of F2-laser power at 157 nm

Stefan Kück, Friedhelm Brandt, Hans-Albert Kremling, Alexander Gottwald, Arne Hoehl, and Mathias Richter  »View Author Affiliations


Applied Optics, Vol. 45, Issue 14, pp. 3325-3330 (2006)
http://dx.doi.org/10.1364/AO.45.003325


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Abstract

We report a comparison of laser power measurements at the F 2 -laser wavelength of 157   nm made at two facilities of the Physikalisch-Technische Bundesanstalt (PTB), the German national metrology institute. At the PTB laboratory at the electron storage ring BESSY II in Berlin, the scale for laser power was directly traced to a cryogenic radiometer operating at 157   nm , whereas at the PTB laser radiometry facility in Braunschweig the calibration of transfer detectors was performed with a newly developed standard for laser power at 157   nm , which is traceable in several steps to a cryogenic radiometer operating at 633   nm . The comparison was performed under vacuum conditions with laser pulse energies of 10   μJ , however with different average powers because different primary standard radiometers were used. The relative deviation for the responsivity of the transfer detector was 4.8 % and thus within the combined standard uncertainty.

© 2006 Optical Society of America

OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(120.5630) Instrumentation, measurement, and metrology : Radiometry
(140.2180) Lasers and laser optics : Excimer lasers

History
Original Manuscript: September 8, 2005
Manuscript Accepted: November 18, 2005

Citation
Stefan Kück, Friedhelm Brandt, Hans-Albert Kremling, Alexander Gottwald, Arne Hoehl, and Mathias Richter, "Absolute measurement of F2-laser power at 157 nm," Appl. Opt. 45, 3325-3330 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-14-3325

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