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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 45, Iss. 15 — May. 20, 2006
  • pp: 3463–3476

Polarization phase-shifting point-diffraction interferometer

Robert M. Neal and James C. Wyant  »View Author Affiliations

Applied Optics, Vol. 45, Issue 15, pp. 3463-3476 (2006)

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A new instrument, the polarization phase-shifting point-diffraction interferometer, has been developed by use of a birefringent pinhole plate. The interferometer uses polarization to separate the test and reference beams, interfering what begin as orthogonal polarization states. The instrument is compact, simple to align, and vibration insensitive and can phase shift without moving parts or separate reference optics. The theory of the interferometer is presented, along with properties and fabrication techniques for the birefringent pinhole plate and a new model used to determine the quality of the reference wavefront from the pinhole as a function of pinhole size and test optic aberrations. The performance of the interferometer is also presented, along with a detailed error analysis and experimental results.

© 2006 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:

Original Manuscript: July 13, 2005
Revised Manuscript: December 14, 2005
Manuscript Accepted: December 24, 2005

Robert M. Neal and James C. Wyant, "Polarization phase-shifting point-diffraction interferometer," Appl. Opt. 45, 3463-3476 (2006)

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