OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 45, Iss. 15 — May. 20, 2006
  • pp: 3463–3476

Polarization phase-shifting point-diffraction interferometer

Robert M. Neal and James C. Wyant  »View Author Affiliations


Applied Optics, Vol. 45, Issue 15, pp. 3463-3476 (2006)
http://dx.doi.org/10.1364/AO.45.003463


View Full Text Article

Enhanced HTML    Acrobat PDF (925 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A new instrument, the polarization phase-shifting point-diffraction interferometer, has been developed by use of a birefringent pinhole plate. The interferometer uses polarization to separate the test and reference beams, interfering what begin as orthogonal polarization states. The instrument is compact, simple to align, and vibration insensitive and can phase shift without moving parts or separate reference optics. The theory of the interferometer is presented, along with properties and fabrication techniques for the birefringent pinhole plate and a new model used to determine the quality of the reference wavefront from the pinhole as a function of pinhole size and test optic aberrations. The performance of the interferometer is also presented, along with a detailed error analysis and experimental results.

© 2006 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Interferometry

History
Original Manuscript: July 13, 2005
Revised Manuscript: December 14, 2005
Manuscript Accepted: December 24, 2005

Citation
Robert M. Neal and James C. Wyant, "Polarization phase-shifting point-diffraction interferometer," Appl. Opt. 45, 3463-3476 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-15-3463


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. O. Y. Kwon, "Multichannel phase-shifted Interferometer," Opt. Lett. 9, 59-61 (1984). [CrossRef] [PubMed]
  2. H. Kadono, T. Nobukatsu, and T. Asakura, "New common-path phase shifting interferometer using a polarization technique," Appl. Opt. 26, 898-904 (1987). [CrossRef] [PubMed]
  3. H. Kadono, M. Ogusu, and S. Toyooka, "Phase shifting common path interferometer using a liquid-crystal phase modulator," Opt. Commun. 110, 391-400 (1994). [CrossRef]
  4. C. R. Mercer and K. Creath, "Liquid-crystal point-diffraction interferometer for wave-front measurements," Appl. Opt. 35, 1633-1642 (1996). [CrossRef] [PubMed]
  5. M. Totzeck, N. Kerwein, A. Tavrov, E. Rosenthal, and H. J. Tiziani, "Quantitative Zernike phase-contrast microscopy by use of structured birefringent pupil-filters and phase-shift evaluation," in Interferometry XI: Techniques and Analysis, K.Creath and J.Schmit, eds., Proc. SPIE 4777, 1-11 (2002).
  6. J. C. Wyant, "Recent Investigations of interferometry and applications to optical testing," in Los Alamos Conference on Optics 1979, D. H. Liebenberg, ed., Proc. SPIE 190, 507-511 (1979).
  7. W. H. Steel, Interferometery (Cambridge U. Press, 1983).
  8. I. J. Hodgkinson and Q. H. Wu, Birefringent Thin Films and Polarizing Elements (World Scientific, 1997). [CrossRef]
  9. I. Hodgkinson and Q. H. Wu, "Review of birefringent and chiral optical interference coatings," in Optical Interference Coating, 2001 OSA Technical Digest (Optical Society of America, 2001), pp. FA1-FA3.
  10. A. Street, "How a FIB works," Integrated Reliability, retrieved 22 May, 2002, http://www.irsi.com/Site1/fibwork.html.
  11. C. Friedrich, "Micromilling tools," Michigan Technological University, Department of Mechanical Engineering-Engineering Mechanics, retrieved 22 May 2002, http://www.me.mtu.edu/∼microweb/chap7/ch7-1.htm (1998).
  12. R. M. Neal, "Polarization phase-shifting point-diffraction interferometer," Ph.D. dissertation (University of Arizona, 2003).
  13. K. A. Goldberg, E. Tejnil, and J. Bokor, "A 3-D numerical study of pinhole diffraction to predict the accuracy of EUV point diffraction interferometry," in Extreme Ultraviolet Lithography, Vol. 4 of OSA Trends in Optics and Photonics (Optical Society of America, 1996), pp. 133-137.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited