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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 45, Iss. 16 — Jun. 1, 2006
  • pp: 3740–3745

Absolute calibration in grazing incidence interferometry via rotational averaging

Klaus Mantel, Jürgen Lamprecht, Norbert Lindlein, and Johannes Schwider  »View Author Affiliations

Applied Optics, Vol. 45, Issue 16, pp. 3740-3745 (2006)

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Interferometry in grazing incidence can be used to test cylindrical mantle surfaces. The absolute accuracy of the resulting surface profiles is limited by systematic wavefront aberrations caused in the interferometer, in particular due to an inversion of the test wavefront in an interferometer using diffractive beam splitters. For cylindrical specimens, a calibration method using four positions has therefore been investigated. This test is combined with another method of optical metrology: the rotational averaging procedure. The implementation for grazing incidence is described and measurement results for hollow cylinders are presented. The gain in accuracy is demonstrated.

© 2006 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(220.4840) Optical design and fabrication : Testing

Original Manuscript: August 11, 2005
Revised Manuscript: September 27, 2005
Manuscript Accepted: October 1, 2005

Klaus Mantel, Jürgen Lamprecht, Norbert Lindlein, and Johannes Schwider, "Absolute calibration in grazing incidence interferometry via rotational averaging," Appl. Opt. 45, 3740-3745 (2006)

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