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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 45, Iss. 16 — Jun. 1, 2006
  • pp: 3740–3745

Absolute calibration in grazing incidence interferometry via rotational averaging

Klaus Mantel, Jürgen Lamprecht, Norbert Lindlein, and Johannes Schwider  »View Author Affiliations


Applied Optics, Vol. 45, Issue 16, pp. 3740-3745 (2006)
http://dx.doi.org/10.1364/AO.45.003740


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Abstract

Interferometry in grazing incidence can be used to test cylindrical mantle surfaces. The absolute accuracy of the resulting surface profiles is limited by systematic wavefront aberrations caused in the interferometer, in particular due to an inversion of the test wavefront in an interferometer using diffractive beam splitters. For cylindrical specimens, a calibration method using four positions has therefore been investigated. This test is combined with another method of optical metrology: the rotational averaging procedure. The implementation for grazing incidence is described and measurement results for hollow cylinders are presented. The gain in accuracy is demonstrated.

© 2006 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(220.4840) Optical design and fabrication : Testing

History
Original Manuscript: August 11, 2005
Revised Manuscript: September 27, 2005
Manuscript Accepted: October 1, 2005

Citation
Klaus Mantel, Jürgen Lamprecht, Norbert Lindlein, and Johannes Schwider, "Absolute calibration in grazing incidence interferometry via rotational averaging," Appl. Opt. 45, 3740-3745 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-16-3740


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References

  1. N. Abramson, "The Interferoscope: a new type of interferometer with variable fringe separation," Optik. (Stuttgart) 30, 56-71 (1969).
  2. K. G. Birch and F. J. Green, "Oblique incidence interferometry applied to nonoptical surfaces," J. Phys. E 6, 1045-1048 (1973). [CrossRef]
  3. S. Brinkmann, T. Dresel, R. Schreiner, and J. Schwider, "Testing of rod objects by grazing incidence interferometry: experiment," Appl. Opt. 38, 121-125 (1999). [CrossRef]
  4. H. Nürge and J. Schwider, "Testing of cylindrical lenses by grazing incidence interferometry," Optik 111, 545-555 (2000).
  5. T. Dresel, S. Brinkmann, R. Schreiner, and J. Schwider, "Testing of rod objects by grazing incidence interferometry: theory," J. Opt. Soc. Am A 15, 2921-2928 (1998). [CrossRef]
  6. K. Mantel, N. Lindlein, and J. Schwider, "Simultaneous characterization of the quality and orientation of cylindrical lens surfaces," Appl. Opt. 44, 2970-2977 (2005). [CrossRef] [PubMed]
  7. S. Brinkmann, "Verfahren zur Prüfung stabförmiger technischer Objekte mittels computer-generierter Hologramme und Interferometrie in streifender Inzidenz," Ph.D. dissertation,Erlangen, (1999).
  8. D. Malacara, Optical Shop Testing (Wiley, 1991).
  9. K.-E. Elssner, R. Burow, J. Grzanna, and R. Spolaczyk, "Absolute sphericity measurement," Appl. Opt. 28, 4649-4661 (1989). [CrossRef] [PubMed]
  10. C. J. Evans, and R. N. Kestner, "Test optics error removal," Appl. Opt. 35, 1015-1021 (1996). [CrossRef] [PubMed]
  11. M. Küchel, "A new approach to solve the three flat problem," Optik 112, 381-391 (2001). [CrossRef]
  12. R. Schreiner, "Interferometric shape measurement of rough surfaces at grazing incidence," Opt. Eng. 41, 1570-1576 (2002). [CrossRef]
  13. J. H. Bruning, D. R. Herriott, J. E. Gallagher, D. P. Rosenfeld, A. D. White, and D. J. Brangaccio, "Digital wavefront measuring interferometer for testing optical surfaces and lenses," Appl. Opt. 13, 2693-2703 (1974). [CrossRef] [PubMed]
  14. J. Schwider, R. Burow, K.-E. Elssner, J. Grzanna, R. Spolaczyk, and K. Merkel, "Digital wave-front measuring interferometry: some systematic error sources," Appl. Opt. 22, 3421-3432 (1983). [CrossRef] [PubMed]

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