An optical system that comprises two devices for remote measurements, a broadband optical interferometer and a scanning Hartmann sensor, is described. The results of simultaneous measurements with both devices and the results of numerical modeling of sample surface heating are presented.
© 2006 Optical Society of America
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6810) Instrumentation, measurement, and metrology : Thermal effects
Original Manuscript: October 20, 2005
Manuscript Accepted: December 17, 2005
Victor V. Zelenogorsky, Alexander A. Solovyov, Ilya E. Kozhevatov, Eugene E. Kamenetsky, Eugene A. Rudenchik, Oleg V. Palashov, Dmitry E. Silin, and Efim A. Khazanov, "High-precision methods and devices for in situ measurements of thermally induced aberrations in optical elements," Appl. Opt. 45, 4092-4101 (2006)