A multilayer coating is a useful addition to a mirror in the x-ray region and has been applied to normal incidence mirrors used with soft x rays. When a multilayer coating is used on grazing incidence optics, higher performance can be achieved than without it. Cr∕Sc multilayers coated on a Wolter type I mirror substrate for a soft x-ray microscope are considered. The reflectivity and effective solid angle are calculated for Wolter type I mirrors with uniform and laterally graded multilayer coatings. The laterally graded multilayer mirror showed superior x-ray performance, and the multilayer tolerances were relaxed. This multilayer mirror could be especially useful in the soft x-ray microscope intended for biological applications.
© 2006 Optical Society of America
Original Manuscript: November 17, 2005
Revised Manuscript: December 27, 2005
Manuscript Accepted: January 2, 2006
Vol. 1, Iss. 8 Virtual Journal for Biomedical Optics
Kwon Su Chon, Yoshiharu Namba, and Kwon-Ha Yoon, "Wolter type I x-ray focusing mirror using multilayer coatings," Appl. Opt. 45, 4609-4616 (2006)