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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 45, Iss. 2 — Jan. 10, 2006
  • pp: 229–234

Light coupling into an optical microcantilever by an embedded diffraction grating

K. Zinoviev, C. Dominguez, J. A. Plaza, V. Cadarso, and L. M. Lechuga  »View Author Affiliations


Applied Optics, Vol. 45, Issue 2, pp. 229-234 (2006)
http://dx.doi.org/10.1364/AO.45.000229


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Abstract

By measuring the excitation efficiency of an optical waveguide on a diffraction grating one can accurately register the changes in the incidence angle of the exciting light beam. This phenomenon was applied to detect ultrasmall deflections of silicon dioxide cantilevers of submicrometer thickness that were fabricated with corrugation on top to act as diffraction grating couplers. The power of light coupled into the cantilevers was monitored with a conventional photodetector and modulated using mechanical vibration of the cantilever, thus changing the spatial orientation of the coupler with respect to the incident light beam. The technique can be considered as an alternative to the methods known for detection of cantilever deflection.

© 2006 Optical Society of America

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(230.4000) Optical devices : Microstructure fabrication
(310.2790) Thin films : Guided waves
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Diffraction and Gratings

Citation
K. Zinoviev, C. Dominguez, J. A. Plaza, V. Cadarso, and L. M. Lechuga, "Light coupling into an optical microcantilever by an embedded diffraction grating," Appl. Opt. 45, 229-234 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-2-229


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References

  1. R. McKendry, J. Zhang, Y. Arntz, T. Strunz, M. Hegner, H. P. Lang, M. K. Baller, U. Certa, E. Meyer, H.-J. Güntherodt, and C. Gerber, "Multiple label free biodetection and quantitative DNA-binding assays on a nanomechanical cantilever array," Proc. Natl. Acad. Sci. USA 99, 9783-9788 (2002). [CrossRef] [PubMed]
  2. J. Thaysen, A. Boisen, O. Hansen, and S. Bouwstra, "Atomic force microscopy probe with piezoresistive read-out and a highly symmetrical Wheatstone bridge arrangement," Sens. Actuators B 83, 47-53 (2000). [CrossRef]
  3. R. Budakian and S. J. Putterman, "Force detection using a fiber-optic cantilever," Appl. Phys. Lett. 81, 2100-2102 (2002). [CrossRef]
  4. R. Petit, Electromagnetic Theory of Gratings (Springer-Verlag, 1980). [CrossRef]
  5. K. Ogawa, W. S. C. Chang, B. L. Sopori, and F. J. Rosenbaum, "A theoretical analysis of etched grating couplers for integrated optics," IEEE J. Quantum Electron. QE-9, 29-42 (1973). [CrossRef]
  6. S. T. Peng and T. Tamir, "Theory of periodic dielectric waveguides," IEEE Trans. Microwave Theory Tech. MTT-23, 123-133 (1975). [CrossRef]
  7. M. T. Wlodarczyk and S. R. Seshadri, "Analysis of grating couplers for planar dielectric waveguides," J. Appl. Phys. 58, 69-87 (1985). [CrossRef]
  8. O. Parriaux, V. A. Sychugov, and A. V. Tishchenko, "Coupling gratings as waveguide functional element," Pure Appl. Opt. 5, 453-469 (1996). [CrossRef]
  9. J. C. Brazas and L. Li, "Analysis of input grating couplers having finite lengths," Appl. Opt. 34, 3786-3792 (1995). [CrossRef] [PubMed]
  10. L. Li and M. C. Gupta, "Effects of beam focusing on the efficiency of planar grating couplers," Appl. Opt. 29, 5320-5325 (1990). [CrossRef] [PubMed]
  11. R. Orobtchouk, A. Layadi, H. Gualous, D. Pascal, A. Koster, and S. Laval, "High-efficiency light coupling in a submicrometric silicon-on-insulator waveguide," Appl. Opt. 39, 5773-5777 (2000). [CrossRef]
  12. S. Ura, T. Fujii, T. Suhara, and H. Nishihara, "Efficiency-enhanced third-order grating coupler," Appl. Opt. 38, 3003-3007 (1999). [CrossRef]
  13. B. N. Zvonkov, K. E. Zinoviev, D. Kh. Nurligareev, I. F. Salakhutdinov, V. V. Svetikov, and V. A. Sychugov, "Tunable wide-aperture semiconductor laser with an external waveguide-grating mirror," Quantum Electron. 31, 35-38 (2001). [CrossRef]
  14. N. Ericsson, M. Hagberg, and A. Larsson, "Highly directional grating outcouplers with tailorable radiation characteristics," IEEE J. Quantum Electron. 32, 1038-1047 (1996). [CrossRef]
  15. W. Streifer, R. D. Burnham, and D. R. Scifres, "Analysis of grating coupled radiation in GaAs:GaAlAs lasers and waveguides," IEEE J. Quantum Electron. QE-12, 422-428 (1976). [CrossRef]
  16. N. Destouches, A. V. Tishchenko, J. C. Pommier, S. Reynaud, O. Parriaux, S. Tonchev, and M. Abdou Ahmed, "99% efficiency measured in the −1st order of a resonant grating," Opt. Express 13, 3230-3235 (2005). [CrossRef] [PubMed]
  17. D. Sarid, Scanning Force Microscopy with Applications to Electric, Magnetic and Atomic Forces (Oxford U. Press, 1994).
  18. E. Anemogiannis and E. N. Glytsis, "Multilayer waveguides: efficient numerical analysis of general structures," J. Lightwave Technol. 10, 1344-1351 (1992). [CrossRef]

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