OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 45, Iss. 2 — Jan. 10, 2006
  • pp: 305–321

Replication of a holographic ion-etched spherical blazed grating for use at extreme-ultraviolet wavelengths: topography

Michael P. Kowalski, William R. Hunter, and Troy W. Barbee, Jr.  »View Author Affiliations


Applied Optics, Vol. 45, Issue 2, pp. 305-321 (2006)
http://dx.doi.org/10.1364/AO.45.000305


View Full Text Article

Enhanced HTML    Acrobat PDF (1440 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We have measured the topography of a holographic ion-etched spherical blazed grating and three of its replicas using an atomic force microscope. The master grating had a roughness of less than 5 Å   rms , a blaze angle of 2.5 ° , and an antiblaze angle of 3.3 ° . Thus the groove profile was more triangular than sawtooth. We find that the replication process did not significantly change the master grating. Moreover, we find no significant difference in roughness, blaze angle, or antiblaze angle between the master and its replicas before or after multilayer coating. However, bumps were observed on the gratings after coating, the cause of which is not understood. Although widespread, they occupy a relatively small fraction of the total area.

© 2006 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(260.7200) Physical optics : Ultraviolet, extreme
(310.1620) Thin films : Interference coatings
(350.1260) Other areas of optics : Astronomical optics

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: October 22, 2004
Revised Manuscript: February 9, 2005
Manuscript Accepted: February 10, 2005
Published: January 10, 2006

Citation
Michael P. Kowalski, William R. Hunter, and Troy W. Barbee, "Replication of a holographic ion-etched spherical blazed grating for use at extreme-ultraviolet wavelengths: topography," Appl. Opt. 45, 305-321 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-2-305

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited