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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 45, Iss. 2 — Jan. 10, 2006
  • pp: 305–321

Replication of a holographic ion-etched spherical blazed grating for use at extreme-ultraviolet wavelengths: topography

Michael P. Kowalski, William R. Hunter, and Troy W. Barbee, Jr.  »View Author Affiliations


Applied Optics, Vol. 45, Issue 2, pp. 305-321 (2006)
http://dx.doi.org/10.1364/AO.45.000305


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Abstract

We have measured the topography of a holographic ion-etched spherical blazed grating and three of its replicas using an atomic force microscope. The master grating had a roughness of less than 5 Å   rms , a blaze angle of 2.5 ° , and an antiblaze angle of 3.3 ° . Thus the groove profile was more triangular than sawtooth. We find that the replication process did not significantly change the master grating. Moreover, we find no significant difference in roughness, blaze angle, or antiblaze angle between the master and its replicas before or after multilayer coating. However, bumps were observed on the gratings after coating, the cause of which is not understood. Although widespread, they occupy a relatively small fraction of the total area.

© 2006 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(260.7200) Physical optics : Ultraviolet, extreme
(310.1620) Thin films : Interference coatings
(350.1260) Other areas of optics : Astronomical optics

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: October 22, 2004
Revised Manuscript: February 9, 2005
Manuscript Accepted: February 10, 2005
Published: January 10, 2006

Citation
Michael P. Kowalski, William R. Hunter, and Troy W. Barbee, "Replication of a holographic ion-etched spherical blazed grating for use at extreme-ultraviolet wavelengths: topography," Appl. Opt. 45, 305-321 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-2-305


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References

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