Michael P. Kowalski,1
William R. Hunter,2
and Troy W. Barbee, Jr.3
1M. P. Kowalski (michael.kowalski@nrl.navy.mil) is with the U.S. Naval Research Laboratory, Code 7655, 4555 Overlook Avenue, SW, Washington, D.C. 20375. USA
2W. R. Hunter is with SFA Incorporated, 9315 Largo Drive West, Suite 200, Largo, Maryland 20774. USA
3T. W. Barbee, Jr., is with the Lawrence Livermore National Laboratory, Mail Stop L-353, 7000 East Avenue, P.O. Box 808, Livermore, California 94550. USA
Michael P. Kowalski, William R. Hunter, and Troy W. Barbee, "Replication of a holographic ion-etched spherical blazed grating for use at extreme-ultraviolet wavelengths: topography," Appl. Opt. 45, 305-321 (2006)
We have measured the topography of a holographic ion-etched spherical blazed grating and three of its replicas using an atomic force microscope. The master grating had a roughness of less than
, a blaze angle of
, and an antiblaze angle of
. Thus the groove profile was more triangular than sawtooth. We find that the replication process did not significantly change the master grating. Moreover, we find no significant difference in roughness, blaze angle, or antiblaze angle between the master and its replicas before or after multilayer coating. However, bumps were observed on the gratings after coating, the cause of which is not understood.
Although widespread, they occupy a relatively small fraction of the total area.
Michael P. Kowalski, Ralf K. Heilmann, Mark L. Schattenburg, Chih-Hao Chang, Frederick B. Berendse, and William R. Hunter Appl. Opt. 45(8) 1676-1679 (2006)
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The upper value was calculated by integrating the Y PSD over the frequency range of 2–40 μm−1. The lower value is the rms for the image of deviations obtained by subtracting an average image from the measured image (Appendix BB). Table values are in units of angstroms rms.
The value in parentheses was calculated using an image that had no bumps.
Fitted Mean and Standard Deviation of Blaze Anglesa
Condition
Master Grating
Replica 1
Replica 2
Replica 3
Prereplication
2.60.7
3.31.1
Postreplication
2.40.4
2.80.5
2.80.7
2.60.9
3.60.7
3.80.4
3.90.8
3.51.2
Multilayer coated
2.60.8
2.40.8
2.50.8
3.90.8
2.60.8
3.70.9
Table values are in degrees. For each entry the top result is for the blaze angle, and the bottom result is for the antiblaze angle. The left-hand number is the absolute value of the fitted mean and the right-hand number is the fitted standard deviation (σ).
The upper value was calculated by integrating the Y PSD over the frequency range of 2–40 μm−1. The lower value is the rms for the image of deviations obtained by subtracting an average image from the measured image (Appendix BB). Table values are in units of angstroms rms.
The value in parentheses was calculated using an image that had no bumps.
Fitted Mean and Standard Deviation of Blaze Anglesa
Condition
Master Grating
Replica 1
Replica 2
Replica 3
Prereplication
2.60.7
3.31.1
Postreplication
2.40.4
2.80.5
2.80.7
2.60.9
3.60.7
3.80.4
3.90.8
3.51.2
Multilayer coated
2.60.8
2.40.8
2.50.8
3.90.8
2.60.8
3.70.9
Table values are in degrees. For each entry the top result is for the blaze angle, and the bottom result is for the antiblaze angle. The left-hand number is the absolute value of the fitted mean and the right-hand number is the fitted standard deviation (σ).