Replication of a holographic ion-etched spherical blazed grating for use at extreme-ultraviolet wavelengths: topography
Applied Optics, Vol. 45, Issue 2, pp. 305-321 (2006)
http://dx.doi.org/10.1364/AO.45.000305
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Abstract
We have measured the topography of a holographic ion-etched spherical blazed grating and three of its replicas using an atomic force microscope. The master grating had a roughness of less than
© 2006 Optical Society of America
OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(260.7200) Physical optics : Ultraviolet, extreme
(310.1620) Thin films : Interference coatings
(350.1260) Other areas of optics : Astronomical optics
ToC Category:
Optical Design and Fabrication
Citation
Michael P. Kowalski, William R. Hunter, and Troy W. Barbee, Jr., "Replication of a holographic ion-etched spherical blazed grating for use at extreme-ultraviolet wavelengths: topography," Appl. Opt. 45, 305-321 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-2-305
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