Using synchrotron radiation, we have measured the efficiency at an angle of incidence of
of a holographic ion-etched spherical blazed grating and three of its fourth-generation replicas.
The measured efficiency profile of replicas 1 and 3 prior to multilayer coating oscillated from thin-film interference produced by the replicas'
structure. A Mo2C∕Si multilayer coating was applied to the master grating and replicas 1 and 2. After coating, the maximum grating efficiency occurred in the
order and the maximum values were
for the master and
for replicas 1 and 2. On the basis of measurements obtained after coating, the derived groove efficiency was
for the master,
for replica 1, and
for replica 2. The groove efficiency of the uncoated replica 3 was
We find that the replicas are reasonably faithful copies of the ion-etched master, and models based on measured atomic force microscope groove profiles are in general agreement with measured results. However,
subtle issues remain regarding the widths of the peak order profile and the location of its maximum wavelength.
© 2006 Optical Society of America
(050.1950) Diffraction and gratings : Diffraction gratings
(120.5700) Instrumentation, measurement, and metrology : Reflection
(310.1620) Thin films : Interference coatings
(350.1260) Other areas of optics : Astronomical optics
Optical Design and Fabrication
Original Manuscript: March 24, 2005
Revised Manuscript: August 20, 2005
Manuscript Accepted: August 22, 2005
Published: January 10, 2006
Michael P. Kowalski, Troy W. Barbee, and William R. Hunter, "Replication of a holographic ion-etched spherical blazed grating for use at extreme-ultraviolet wavelengths: efficiency," Appl. Opt. 45, 322-334 (2006)