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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 45, Iss. 2 — Jan. 10, 2006
  • pp: 322–334

Replication of a holographic ion-etched spherical blazed grating for use at extreme-ultraviolet wavelengths: efficiency

Michael P. Kowalski, Troy W. Barbee, Jr., and William R. Hunter  »View Author Affiliations


Applied Optics, Vol. 45, Issue 2, pp. 322-334 (2006)
http://dx.doi.org/10.1364/AO.45.000322


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Abstract

Using synchrotron radiation, we have measured the efficiency at an angle of incidence of 10 ° of a holographic ion-etched spherical blazed grating and three of its fourth-generation replicas. The measured efficiency profile of replicas 1 and 3 prior to multilayer coating oscillated from thin-film interference produced by the replicas' Al∕Al 2 O 3 / SiO 2 structure. A Mo2C∕Si multilayer coating was applied to the master grating and replicas 1 and 2. After coating, the maximum grating efficiency occurred in the 2 nd order and the maximum values were 12.4 % at 143.8   Å for the master and 11.6 % at 145.2   Å for replicas 1 and 2. On the basis of measurements obtained after coating, the derived groove efficiency was 22 .2% for the master, 19 .4% for replica 1, and 19 .3% for replica 2. The groove efficiency of the uncoated replica 3 was 24.3 % at 142 .5   Å . We find that the replicas are reasonably faithful copies of the ion-etched master, and models based on measured atomic force microscope groove profiles are in general agreement with measured results. However, subtle issues remain regarding the widths of the peak order profile and the location of its maximum wavelength.

© 2006 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.5700) Instrumentation, measurement, and metrology : Reflection
(310.1620) Thin films : Interference coatings
(350.1260) Other areas of optics : Astronomical optics

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: March 24, 2005
Revised Manuscript: August 20, 2005
Manuscript Accepted: August 22, 2005
Published: January 10, 2006

Citation
Michael P. Kowalski, Troy W. Barbee, and William R. Hunter, "Replication of a holographic ion-etched spherical blazed grating for use at extreme-ultraviolet wavelengths: efficiency," Appl. Opt. 45, 322-334 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-2-322


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References

  1. R. G. Cruddace, T. W. Barbee, J. C. Rife, W. R. Hunter, “Measurements of the normal-incidence x-ray reflectance of a molybdenum-silicon multilayer deposited on a 2000-l/mm grating,” Phys. Scr. 41, 396–399 (1990).
  2. M. P. Kowalski, T. W. Barbee, R. G. Cruddace, J. F. Seely, J. C. Rife, W. R. Hunter, “Efficiency and long-term stability of a multilayer-coated ion-etched blazed holographic grating in the 125–133-Å wavelength region,” Appl. Opt. 34, 7338–7346 (1995).
  3. J. F. Seely, R. G. Cruddace, M. P. Kowalski, W. R. Hunter, T. W. Barbee, J. C. Rife, R. Eby, K. G. Stolt, “Polarization and efficiency of a concave multilayer grating in the 135–250-Å region and in normal-incidence and Seya–Namioka mounts,” Appl. Opt. 34, 7347–7354 (1995).
  4. M. P. Kowalski, R. G. Cruddace, J. F. Seely, J. C. Rife, K. F. Heidemann, U. Heinzmann, U. Kleineberg, K. Osterried, D. Menke, W. R. Hunter, “Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5–16.0-nm wavelength region,” Opt. Lett. 22, 834–836 (1997).
  5. J. F. Seely, M. P. Kowalski, R. G. Cruddace, K. F. Heidemann, U. Heinzmann, U. Kleineberg, K. Osterried, D. Menke, J. C. Rife, W. R. Hunter, “Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-Å wavelength region,” Appl. Opt. 36, 8206–8213 (1997).
  6. M. P. Kowalski, J. F. Seely, W. R. Hunter, J. C. Rife, T. W. Barbee, G. E. Holland, C. N. Boyer, C. M. Brown, R. G. Cruddace, “Dual-waveband operation of a multilayer-coated diffraction grating in the soft x-ray range at near-normal incidence,” Appl. Opt. 32, 2422–2425 (1993).
  7. J. F. Seely, M. P. Kowalski, W. R. Hunter, J. C. Rife, T. W. Barbee, G. E. Holland, C. N. Boyer, C. M. Brown, “On-blaze operation of a Mo∕Si multilayer-coated concave diffraction grating in the 136–142-Å wavelength region and near normal incidence,” Appl. Opt. 32, 4890–4897 (1993).
  8. J. F. Seely, M. P. Kowalski, W. R. Hunter, T. W. Barbee, R. G. Cruddace, J. C. Rife, “Normal-incidence efficiencies in the 115–340-Å wavelength region of replicas of the Skylab 3600-line∕mm grating with multilayer and gold coatings,” Appl. Opt. 34, 6453–6458 (1995).
  9. W. R. Hunter, J. F. Seely, M. P. Kowalski, J. C. Rife, T. W. Barbee, “Grazing-incidence efficiencies in the 24–42-Å wavelength region of replicas of the Skylab 3600-line∕mm concave grating with multilayer and gold coatings,” Appl. Opt. 36, 6411–6415 (1997).
  10. M. P. Kowalski, T. W. Barbee, K. F. Heidemann, H. Gursky, J. C. Rife, W. R. Hunter, G. G. Fritz, R. G. Cruddace, “Efficiency calibration of the first multilayer-coated holographic ion-etched flight grating for a sounding rocket high-resolution spectrometer,” Appl. Opt. 38, 6487–6493 (1999).
  11. M. P. Kowalski, H. Gursky, J. C. Rife, D. J. Yentis, R. G. Cruddace, T. W. Barbee, W. H. Goldstein, J. F. Kordas, K. F. Heidemann, G. G. Fritz, W. R. Hunter, M. A. Barstow, G. W. Fraser, N. P. Bannister, J. S. Lapington, J. A. Tandy, B. Sanderson, “Efficiency calibration of the four multilayer-coated holographic ion-etched flight gratings for a sounding rocket high-resolution spectrometer,” in UV/EUV and Visible Space Instrumentation for Astronomy and Solar Physics, O. H. W. Svegmund, S. Fineschi, and M. A. Gummin, eds., Proc. SPIE 4498, 303–314 (2001). [CrossRef]
  12. M. Kowalski, “Space Science Division's J-PEX instrument to provide new data on the evolution of white dwarf stars,” NRL Labstracts (U.S. Naval Research Laboratory, 2001).
  13. R. G. Cruddace, M. P. Kowalski, D. Yentis, G. G. Fritz, C. M. Brown, H. Gursky, M. A. Barstow, N. P. Bannister, G. W. Fraser, J. E. Spragg, J. S. Lapington, J. A. Tandy, B. Sanderson, J. L. Culhane, T. W. Barbee, J. F. Kordas, W. Goldstein, “High-resolution spectroscopy of G191-B2B in the extreme ultraviolet,” Astrophys. J. Lett. 565, L47–L50 (2002). [CrossRef]
  14. M. A. Barstow, R. G. Cruddace, M. P. Kowalski, N. P. Bannister, D. Yentis, J. S. Lapington, J. A. Tandy, I. Hubeny, S. Schuh, S. Dreizler, T. W. Barbee, “High resolution EUV spectroscopy of G191-B2B II: structure of the stellar photosphere and the surrounding interstellar medium,” Mon. Not. R. Astron. Soc. 362, 1273–1278 (2005). [CrossRef]
  15. M. P. Kowalski, W. R. Hunter, T. W. Barbee, “Replication of a holographic ion-etched spherical blazed grating for use at extreme-ultraviolet wavelengths: topography,” Appl. Opt. 45, 305–321 (2006).
  16. W. R. Hunter, R. T. Williams, J. C. Rife, J. P. Kirkland, M. N. Kabler, “A grating/crystal monochromator for the spectral range 5 eV to 5 keV,” Nucl. Instrum. Methods Phys. Res. 195, 141–153 (1982). [CrossRef]
  17. M. P. Kowalski, R. G. Cruddace, J. F. Seely, J. C. Rife, W. R. Hunter, “Uncertainties in reflectance measurements made on the NRL beam line X24C,” NRL Memo. Rep. 7620-95-7738 (U.S. Naval Research Laboratory, 1995).
  18. W. R. Hunter, J. C. Rife, “An ultrahigh vacuum reflectometer/goniometer for use with synchrotron radiation,” Nucl. Instrum. Methods Phys. Res. A 246, 465–468 (1986). [CrossRef]
  19. M. P. Kowalski, J. F. Seely, L. I. Goray, W. R. Hunter, J. C. Rife, “Comparison of the calculated and the measured efficiencies of a normal-incidence grating in the 125–225-Å wavelength range,” Appl. Opt. 36, 8939–8943 (1997).
  20. W. R. Hunter, M. P. Kowalski, J. C. Rife, R. G. Cruddace, “Investigation of the properties of an ion-etched plane laminar holographic grating,” Appl. Opt. 40, 6157–6165 (2001).
  21. J. F. Seely, L. I. Goray, W. R. Hunter, J. C. Rife, “Thin-film interference effects on the efficiency of a normal-incidence grating in the 100–350-Å wavelength region,” Appl. Opt. 38, 1251–1258 (1999).
  22. L. I. Goray, J. F. Seely, “Efficiencies of master, replica, and multilayer gratings for the soft-x-ray–extreme-ultraviolet range: modeling based on the modified integral method and comparisons with measurements,” Appl. Opt. 41, 1434–1445 (2002).
  23. E. L. Church, P. Z. Takacs, “Surface scattering,” in Handbook of Optics, M. Bass, E. W. Van Stryland, D. R. Williams, and W. L. Wolfe, eds. (McGraw-Hill, 1995), Vol. 1, p. 7.11.
  24. T. W. Barbee, J. C. Rife, W. R. Hunter, M. P. Kowalski, R. G. Cruddace, J. F. Seely, “Long-term stability of a Mo∕Si multilayer structure,” Appl. Opt. 32, 4852–4854 (1993).
  25. http://www-cxro.lbl.gov/.
  26. C. Montcalm, S. Bajt, J. F. Seely, “MoRu-Be multilayer-coated grating with 10.4% normal-incidence efficiency near the 11.4-nm wavelength,” Opt. Lett. 26, 125–127 (2001).
  27. J. F. Seely, C. Montcalm, S. Baker, S. Bajt, “High-efficiency MoRu∕Be multilayer coated gratings operating near normal incidence in the 11.1–12.0-nm wavelength range,” Appl. Opt. 40, 5565–5574 (2001).
  28. M. P. Kowalski, R. G. Cruddace, K. F. Heidemann, R. Lenke, H. Kierey, T. W. Barbee, W. R. Hunter, “Record high extreme ultraviolet efficiency at near-normal incidence from a multilayer-coated polymer-overcoated blazed ion-etched holographic grating,” Opt. Lett. 29, 2914–2916 (2004). [CrossRef]
  29. M. P. Kowalski, R. G. Cruddace, T. W. Barbee, W. R. Hunter, K. F. Heidemann, B. Nelles, R. Lenke, H. Kierey, “High-efficiency multilayer-coated polymer-overcoated blazed ion-etched holographic gratings for high-resolution EUV astronomical spectroscopy,” in UV and Gamma Ray Space Telescope Systems, G. Hasinger and M. J. Turner, eds., Proc. SPIE 5488, 910–921 (2004). [CrossRef]
  30. B. Vidal, P. Vincent, P. Dhez, M. Neviere, “Thin films and gratings: theories used to optimize the high reflectivity of mirrors and gratings for x-ray optics,” in Applications of Thin-Film Multilayered Structures to Figured X-Ray Optics, G. F. Marshall, ed., Proc. SPIE 563, 142–149 (1985).
  31. K.-H. Hellwege, “Uber rasterförmige Reflexionsgitter,” Z. Phys. 106, 588–596 (1937). [CrossRef]
  32. K.-H. Hellwege, “Über rasterförmige Reflexionsgitter, Nachtrag,” Z. Phys. 111, 495–497 (1939). [CrossRef]

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