OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 45, Iss. 2 — Jan. 10, 2006
  • pp: 322–334

Replication of a holographic ion-etched spherical blazed grating for use at extreme-ultraviolet wavelengths: efficiency

Michael P. Kowalski, Troy W. Barbee, Jr., and William R. Hunter  »View Author Affiliations


Applied Optics, Vol. 45, Issue 2, pp. 322-334 (2006)
http://dx.doi.org/10.1364/AO.45.000322


View Full Text Article

Enhanced HTML    Acrobat PDF (2221 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Using synchrotron radiation, we have measured the efficiency at an angle of incidence of 10 ° of a holographic ion-etched spherical blazed grating and three of its fourth-generation replicas. The measured efficiency profile of replicas 1 and 3 prior to multilayer coating oscillated from thin-film interference produced by the replicas' Al∕Al 2 O 3 / SiO 2 structure. A Mo2C∕Si multilayer coating was applied to the master grating and replicas 1 and 2. After coating, the maximum grating efficiency occurred in the 2 nd order and the maximum values were 12.4 % at 143.8   Å for the master and 11.6 % at 145.2   Å for replicas 1 and 2. On the basis of measurements obtained after coating, the derived groove efficiency was 22 .2% for the master, 19 .4% for replica 1, and 19 .3% for replica 2. The groove efficiency of the uncoated replica 3 was 24.3 % at 142 .5   Å . We find that the replicas are reasonably faithful copies of the ion-etched master, and models based on measured atomic force microscope groove profiles are in general agreement with measured results. However, subtle issues remain regarding the widths of the peak order profile and the location of its maximum wavelength.

© 2006 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.5700) Instrumentation, measurement, and metrology : Reflection
(310.1620) Thin films : Interference coatings
(350.1260) Other areas of optics : Astronomical optics

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: March 24, 2005
Revised Manuscript: August 20, 2005
Manuscript Accepted: August 22, 2005
Published: January 10, 2006

Citation
Michael P. Kowalski, Troy W. Barbee, and William R. Hunter, "Replication of a holographic ion-etched spherical blazed grating for use at extreme-ultraviolet wavelengths: efficiency," Appl. Opt. 45, 322-334 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-2-322

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited