Precisely introducing defects into periodic structures by using a double-step laser scanning technique
Applied Optics, Vol. 45, Issue 22, pp. 5777-5782 (2006)
http://dx.doi.org/10.1364/AO.45.005777
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Abstract
We demonstrate a promising method to precisely introduce desired defects into large-area periodic structures by using a double-step laser scanning technique. A multiexposure two-beam interference technique is first used to create 2D periodic structures. A low power femtosecond laser combined with a high numerical aperture objective lens is then used to map the periodic structures to determine the positions and orientations of air holes or material cylinders without intermediate development. Based on the mapping results, the desired defects are written precisely into these structures by increasing the power of the femtosecond laser to induce a multiphoton polymerization effect. The experimental results show that defects are patterned with accurate positions and orientations. This proposed technique should be useful for fabrication of photonic crystals with well-defined defects.
© 2006 Optical Society of America
OCIS Codes
(090.0090) Holography : Holography
(110.5220) Imaging systems : Photolithography
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(260.3160) Physical optics : Interference
ToC Category:
Optical Design and Fabrication
History
Original Manuscript: January 3, 2006
Revised Manuscript: March 8, 2006
Manuscript Accepted: March 13, 2006
Citation
Ngoc Diep Lai, Jian Hung Lin, Wen Ping Liang, Chia Chen Hsu, and Cheng Hsiung Lin, "Precisely introducing defects into periodic structures by using a double-step laser scanning technique," Appl. Opt. 45, 5777-5782 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-22-5777
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