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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 45, Iss. 23 — Aug. 10, 2006
  • pp: 5877–5880

Concave reflective SU-8 photoresist gratings for flat-field integrated spectrometers

Dan A. Zauner, Anders M. Jorgensen, Thomas A. Anhoj, and Jörg Hübner  »View Author Affiliations

Applied Optics, Vol. 45, Issue 23, pp. 5877-5880 (2006)

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On-chip spectrometry will play a leading role in the development of micro-optofluidic systems for analytical chemistry. Integrated spectrometers fabricated using a polymer-on-silicon platform have been designed, fabricated, and characterized. Reflective grating designs have been implemented using a recursive algorithm to calculate the facet positions as described by McGreer [Appl. Opt. 35, 5904 (1996)]. It is shown that the free spectral range, the output focal plane geometry, and the linear dispersion can be selected with a high degree of control independently of the chosen grating order. The polymer-on-silicon platform facilitates integration with microfluidic circuits and cost-efficient batch fabrication.

© 2006 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(160.5470) Materials : Polymers
(220.2740) Optical design and fabrication : Geometric optical design
(230.3120) Optical devices : Integrated optics devices

Original Manuscript: September 1, 2005
Manuscript Accepted: December 16, 2005

Virtual Issues
Vol. 1, Iss. 9 Virtual Journal for Biomedical Optics

Dan A. Zauner, Anders M. Jorgensen, Thomas A. Anhoj, and Jörg Hübner, "Concave reflective SU-8 photoresist gratings for flat-field integrated spectrometers," Appl. Opt. 45, 5877-5880 (2006)

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