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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 45, Iss. 23 — Aug. 10, 2006
  • pp: 5897–5902

Fabrication of small complex-shaped optics by plasma chemical vaporization machining with a microelectrode

Hideo Takino, Norio Shibata, Hiroshi Itoh, Teruki Kobayashi, Koshichi Nemoto, Takashi Fujii, Naohiko Goto, Kazuya Yamamura, Yasuhisa Sano, and Yuzo Mori  »View Author Affiliations


Applied Optics, Vol. 45, Issue 23, pp. 5897-5902 (2006)
http://dx.doi.org/10.1364/AO.45.005897


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Abstract

We have developed plasma chemical vaporization machining by using a microelectrode for the fabrication of small complex-shaped optical surfaces. In this method, a 0.5   mm diameter pipe microelectrode, from which processing gas is drawn in, generates a small localized plasma that is scanned over a workpiece under numerical computer control to shape a desired surface. A 12   mm × 12   mm nonaxisymmetric mirror with a maximum depth of approximately 3   μm was successfully fabricated with a peak-to-valley shape accuracy of 0 .04   μm in an area excluding the edges of the mirror. The average surface roughness was 0 .58   nm , which is smooth enough for optical use.

© 2006 Optical Society of America

OCIS Codes
(160.2750) Materials : Glass and other amorphous materials
(220.1250) Optical design and fabrication : Aspherics
(220.4610) Optical design and fabrication : Optical fabrication
(240.6700) Optics at surfaces : Surfaces
(350.4600) Other areas of optics : Optical engineering
(350.5400) Other areas of optics : Plasmas

History
Original Manuscript: January 18, 2006
Manuscript Accepted: February 23, 2006

Citation
Hideo Takino, Norio Shibata, Hiroshi Itoh, Teruki Kobayashi, Koshichi Nemoto, Takashi Fujii, Naohiko Goto, Kazuya Yamamura, Yasuhisa Sano, and Yuzo Mori, "Fabrication of small complex-shaped optics by plasma chemical vaporization machining with a microelectrode," Appl. Opt. 45, 5897-5902 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-23-5897


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References

  1. D. Bollinger, G. Gallatin, J. Samuels, G. Steinberg, and C. Zarowin, "Rapid, noncontact optical figuring of aspheric surfaces with plasma assisted chemical etching (PACE)," in Advanced Optical Manufacturing and Testing, L.R.Baker, P.B.Reid, and G.M.Sanger, eds., Proc. SPIE 1333,44-57 (1990).
  2. Y. Mori, K. Yamamura, K. Yamauchi, K. Yoshii, T. Kataoka, K. Endo, K. Inagaki, and H. Kakiuchi, "Plasma CVM (chemical vaporization machining)--a chemical machining method with equal performances to conventional mechanical methods from the sense of removal rates and spatial resolutions," in Proceedings of the Seventh International Precision Engineering Seminar (Butterworth-Heinemann, 1993), pp. 78-87.
  3. G. Boehm, W. Frank, A. Schindler, A. Nickel, H. J. Thomas, F. Bigl, and M. Weiser, "Plasma jet chemical etching--a tool for the figuring of optical precision aspheres," in Proceedings of the Ninth International Conference on Production Engineering--Precision Science and Technology for Perfect Surfaces, Y.Furukawa, Y.Mori, and T.Kataoka, eds. (Japan Society for Precision Engineering, 1999), pp. 231-236.
  4. H. Takino, N. Shibata, H. Itoh, T. Kobayashi, H. Tanaka, M. Ebi, K. Yamamura, Y. Sano, and Y. Mori, "Computer numerically controlled plasma chemical vaporization machining with a pipe electrode for optical fabrication," Appl. Opt. 37, 5198-5210 (1998). [CrossRef]
  5. Y. Mori, K. Yamauchi, K. Yamamura, and Y. Sano, "Development of plasma chemical vaporization machining," Rev. Sci. Instrum. 71, 4627-4632 (2000). [CrossRef]
  6. Y. Mori, K. Yamamura, and Y. Sano, "The study of fabrication of the x-ray mirror by numerically controlled plasma chemical vaporization machining: development of the machine for the x-ray mirror fabrication," Rev. Sci. Instrum. 71, 4620-4626 (2000). [CrossRef]
  7. H. Takino, N. Shibata, H. Itoh, T. Kobayashi, K. Yamamura, Y. Sano, and Y. Mori, "Fabrication of optics by use of plasma chemical vaporization machining with a pipe electrode," Appl. Opt. 41, 3971-3977 (2002). [CrossRef] [PubMed]
  8. K. Nemoto, T. Fujii, N. Goto, H. Takino, T. Kobayashi, N. Shibata, K. Yamamura, and Y. Mori, "Laser beam intensity profile transformation with a fabricated mirror," Appl. Opt. 36, 551-557 (1997). [CrossRef] [PubMed]

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