A method for the determination of the optical constants of thin films based on the combination of a waveguide measurement procedure with the spectroscopic measurements made from the UV to the IR is presented. As a test material AlN thin film on sapphire substrates is investigated.
© 2006 Optical Society of America
Original Manuscript: September 20, 2005
Revised Manuscript: January 17, 2006
Manuscript Accepted: March 14, 2006
Ildar Salakhutdinov, Yuriy Danylyuk, Kalyani Chaganti, Ivan Avrutsky, and Gregory Auner, "Model-independent method for the determination of guiding thin-film optical parameters," Appl. Opt. 45, 6007-6012 (2006)