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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 45, Iss. 25 — Sep. 1, 2006
  • pp: 6640–6645

Characterization of high refractive index semiconductor films by surface plasmon resonance

Sergiy Patskovsky, Souleymane Bah, Michel Meunier, and Andrei V. Kabashin  »View Author Affiliations

Applied Optics, Vol. 45, Issue 25, pp. 6640-6645 (2006)

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Si-based surface plasmon resonance (SPR) in the Kretschmann–Raether geometry is considered as a platform for the optical measurement of high refractive index films. The implementation of the SPR effect becomes possible due to the relatively high index of refraction of Si compared to most materials. As examples we study the SPR responses for some important semiconductor-based films, including laser-ablated porous silicon and thin germanium films. Using SPR data, we determine the refractive indices of these films for different parameters (thickness and porosity) and ambiences. We also discuss novel SPR biosensor architectures with the use of these solid films.

© 2006 Optical Society of America

OCIS Codes
(120.4820) Instrumentation, measurement, and metrology : Optical systems
(240.6680) Optics at surfaces : Surface plasmons
(310.6860) Thin films : Thin films, optical properties

Original Manuscript: January 27, 2006
Revised Manuscript: March 29, 2006
Manuscript Accepted: April 5, 2006

Virtual Issues
Vol. 1, Iss. 10 Virtual Journal for Biomedical Optics

Sergiy Patskovsky, Souleymane Bah, Michel Meunier, and Andrei V. Kabashin, "Characterization of high refractive index semiconductor films by surface plasmon resonance," Appl. Opt. 45, 6640-6645 (2006)

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  1. V. M. Agranovich and D. L. Mills, eds., Surface Polaritons: Electromagnetic Waves at Surfaces and Interfaces (North-Holland, 1982).
  2. B. Liedberg, C. Nylander, and I. Lundstrum, "Surface plasmon resonance for gas detection and biosensing," Sens. Actuators B 4, 299-304 (1983). [CrossRef]
  3. B. Liedberg, C. Nylander, and I. Lundstrom, "Biosensing with surface plasmon resonance: How it all started," Biosens. Bioelectron. 10, i-ix (1995). [CrossRef] [PubMed]
  4. J. L. Melendez, R. Carr, D. U. Bartholomew, K. A. Kukanskis, J. Elkind, S. S. Yee, C. E. Furlong, and R. G. Woodbury, "A commercial solution for surface plasmon sensing," Sens. Actuators B 35, 212-216 (1996). [CrossRef]
  5. L. M. Zhang and D. Uttamchandani, "Optical chemical sensing employing surface plasmon resonance," Electron. Lett. 23, 1469-1470 (1988). [CrossRef]
  6. R. C. Jorgenson and S. S. Yee, "Fiber-optic chemical sensor based on surface plasmon resonance," Sens. Actuators B 12, 213-220 (1993). [CrossRef]
  7. E. Kretschmann and H. Raether, "Radiative decay of nonradiative surface plasmons excited by light," Z. Naturforsch. A 23, 2135-2136 (1968).
  8. A. V. Kabashin and P. I. Nikitin, "Surface plasmon resonance interferometer for bio- and chemical-sensors," Opt. Commun. 150, 5-8 (1998). [CrossRef]
  9. A. N. Grigorenko, P. I. Nikitin, and A. V. Kabashin, "Phase jumps and interferometric surface plasmon resonance imaging," Appl. Phys. Lett. 75, 3917-3919 (1999). [CrossRef]
  10. S. Patskovsky, A. V. Kabashin, M. Meunier, and J. H. T. Luong, "Properties and sensing characteristics of surface plasmon resonance in infrared light," J. Opt. Soc. Am. A 20, 1644-1650 (2003). [CrossRef]
  11. S. Patskovsky, A. V. Kabashin, M. Meunier, and J. H. T. Luong, "Surface plasmon resonance sensor on a silicon platform," Sens. Actuators B 97, 409-414 (2004). [CrossRef]
  12. S. Patskovsky, A. V. Kabashin, M. Meunier, and J. H. T. Luong, "Silicon-based surface plasmon resonance sensing with two surface plasmon polariton modes," Appl. Opt. 42, 6905-6909 (2003). [CrossRef] [PubMed]
  13. S. Patskovsky, A. V. Kabashin, M. Meunier, and J. H. T. Luong, "Multi-layer Si-based surface plasmon resonance structure for absorption sensing," Anal. Lett. 36, 3237-3246 (2003). [CrossRef]
  14. V. Kabashin, J.-P. Sylvestre, S. Patskovsky, and M. Meunier, "Correlation between photoluminescence properties and morphology of laser-ablated Si/SiOx nanostructured films," J. Appl. Phys. 91, 3248-3254 (2002). [CrossRef]
  15. L. G. Parratt, "Surface studies of solids by total reflection of X-rays," Phys. Rev. 95, 359-369 (1954). [CrossRef]
  16. Data may be retrieved athttp://www.sopra-sa.com/more/database.asp.
  17. R. A. Innes and J. R. Sambles, "Optical characterization of gold using surface plasmon-polaritons," J. Phys. F 17, 277-287 (1987). [CrossRef]
  18. K. Johansen, H. Arwin, I. Lundström, and B. Liedberg, "Imaging surface plasmon resonance sensor based on multiple wavelengths: Sensitivity considerations," Rev. Sci. Instrum. 71, 3530-3538 (2000). [CrossRef]
  19. C. M. Herzinger, B. Johs, W. A. McGahan, J. A. Woollam, and W. Paulson, "Ellipsometric determination of optical constants for silicon and thermally grown silicon dioxide via a multisample, multiwavelength, multiangle investigation," J. Appl. Phys. 83, 3323-3336 (1998). [CrossRef]
  20. E. V. Astrova and V. A. Tolmachev, "Effective refractive index and composition of oxidized porous silicon films," Mater. Sci. Eng. B 69, 142-148 (2000). [CrossRef]
  21. E. Hecht, Optics, 2nd ed. (Addison-Wesley, 1987).
  22. D. A. G. Bruggeman, "Calculation of various physical constants of heterogeneous substances. I. Dielectric constant and conductivity of mixtures of isotropic substances," Ann. Phys. 24, 636-664 (1935). [CrossRef]
  23. J. M. Brockman, A. G. Frutos, and R. M. Corn, "A multi-step chemical modification procedure to create DNA arrays on gold surfaces for the study of protein-DNA interactions with surface plasmon resonance imaging," J. Am. Chem. Soc. 121, 8044-8051 (1999). [CrossRef]
  24. M. Thust, M. J. Schoning, S. Frohnhoff, R. Arens-Fischer, P. Kordos, and H. Luth, "Porous silicon as a substrate material for potentiometric biosensors," Meas. Sci. Technol. 7, 26-29 (1996). [CrossRef]

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