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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 45, Iss. 27 — Sep. 20, 2006
  • pp: 6965–6972

Improved optical profiling using the spectral phase in spectrally resolved white-light interferometry

Sanjit Kumar Debnath and Mahendra Prasad Kothiyal  »View Author Affiliations

Applied Optics, Vol. 45, Issue 27, pp. 6965-6972 (2006)

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In spectrally resolved white-light interferometry (SRWLI), the white-light interferogram is decomposed into its monochromatic constituent. The phase of the monochromatic constituents can be determined using a phase-shifting technique over a range of wavelengths. These phase values have fringe order ambiguity. However, the variation of the phase with respect to the wavenumber is linear and its slope gives the absolute value of the optical-path difference. Since the path difference is related to the height of the test object at a point, a line profile can be determined without ambiguity. The slope value, though less precise helps us determine the fringe order. The fringe order combined with the monochromatic phase value gives the absolute profile, which has the precision of phase-shifting interferometry. The presence of noise in the phase may lead to the misidentification of fringe order, which in turn gives unnecessary jumps in the precise profile. The experimental details of measurement on standard samples with SRWLI are discussed in this paper.

© 2006 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

Original Manuscript: January 24, 2006
Revised Manuscript: April 18, 2006
Manuscript Accepted: May 8, 2006

Sanjit Kumar Debnath and Mahendra Prasad Kothiyal, "Improved optical profiling using the spectral phase in spectrally resolved white-light interferometry," Appl. Opt. 45, 6965-6972 (2006)

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  1. M. Davidson, K. Kaufman, I. Mazor, and F. Cohent, "An application of interference microscopy to integrated circuit inspection and metrology," in Integrated Circuit Metrology, Inspection, and Process Control, K. M. Monahan, ed., Proc. SPIE 775, 233-247 (1987).
  2. B. S. Lee and T. C. Strand, "Profilometry with a coherence scanning microscope," Appl. Opt. 29, 3784-3788 (1990). [CrossRef] [PubMed]
  3. G. S. Kino and S. C. Chim, "Mirau correlation microscope," Appl. Opt. 29, 3775-3783 (1990). [CrossRef] [PubMed]
  4. T. Dresel, G. Häusler, and H. Venzke, "Three-dimensional sensing of rough surfaces by coherence radar," Appl. Opt. 31, 919-925 (1992). [CrossRef] [PubMed]
  5. P. J. Caber, "Interferometric profiler for rough surfaces," Appl. Opt. 32, 3438-3441 (1993). [CrossRef] [PubMed]
  6. P. Sandoz and G. Tribillon, "Profilometry by zero order interference fringe identification," J. Mod. Opt. 40, 1691-1700 (1993). [CrossRef]
  7. P. de Groot and L. Deck, "Surface profiling by analysis of white light interferograms in the spatial frequency domain," J. Mod. Opt. 42, 389-401 (1995). [CrossRef]
  8. K. G. Larkin, "Efficient nonlinear algorithm for envelope detection in white light interferometry," J. Opt. Soc. Am. A 13, 832-843 (1996). [CrossRef]
  9. P. Sandoz, "An algorithm for profilometry by white light phase shifting interferometry," J. Mod. Opt. 43, 1545-1554 (1996). [CrossRef]
  10. P. Sandoz, R. Devillers, and A. Plata, "Unambiguous profilometry by fringe-order identification in white-light phase-shifting interferometry," J. Mod. Opt. 44, 519-534 (1997). [CrossRef]
  11. A. Harasaki, J. Schmit, and J. C. Wyant, "Improved vertical-scanning interferometry," Appl. Opt. 39, 2107-2115 (2000). [CrossRef]
  12. A. Pfortner and J. Schwider, "Dispersion error in white-light Linnik interferometers and its implications for evaluation procedures," Appl. Opt. 40, 6223-6228 (2001). [CrossRef]
  13. P. de Groot, X. C. de Lega, J. Kramer, and M. Turzhitsky, "Determination of fringe order in white-light interference microscopy," Appl. Opt. 41, 4571-4578 (2002). [CrossRef] [PubMed]
  14. J. Schwider and L Zhou, "Dispersive interferometric profilometer," Opt. Lett. 19, 995-997 (1994). [CrossRef] [PubMed]
  15. P. Sandoz, G. Tribillon, and H. Perrin, "High resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white light interferograms," J. Mod. Opt. 43, 701-708 (1996). [CrossRef]
  16. J. Calatroni, A. L. Guerrero, C. Sainz, and R. Escalona, "Spectrally-resolved white-light interferometry as a profilometry tool," Opt. Laser Technol. , 28, 485-489 (1996). [CrossRef]
  17. S. Suja Helen, M. P. Kothiyal, and R. S. Sirohi, "Analysis of spectrally resolved white light interferograms: use of a phase shifting technique," Opt. Eng. 40, 1329-1336 (2001). [CrossRef]
  18. S. K. Debnath and M. P. Kothiyal, "Optical profiler based on spectrally resolved white light interferometry," Opt. Eng. 44, 013606 (2005). [CrossRef]
  19. P. Hariharan, B. F. Oreb, and T. Eiju, "Digital phase-shifting interferometer: a simple error-compensating phase calculation algorithm," Appl. Opt. 26, 2504-2506 (1987). [CrossRef] [PubMed]
  20. A. Harasaki and J. C. Wyant, "Fringe modulation skewing effect in white light vertical scanning interferometry," Appl. Opt. 39, 2101-2106 (2000). [CrossRef]
  21. K. Creath, "Calibration of numerical aperture effects in interferometric microscope objectives," Appl. Opt. 28, 3333-3338 (1989). [CrossRef] [PubMed]
  22. A. Dubois, J. Selb, L. Vabre, and A. C. Boccara, "Phase measurements with wide-aperture interferometers," Appl. Opt. 39, 2326-2331 (2000). [CrossRef]

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