Linear astigmatism of confocal off-axis reflective imaging systems and its elimination
Applied Optics, Vol. 45, Issue 3, pp. 484-488 (2006)
http://dx.doi.org/10.1364/AO.45.000484
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Abstract
Linear astigmatism of a confocal off-axis reflective imaging system when the object plane is tilted and located at a finite distance from the imaging system is derived. We show that linear astigmatism can be eliminated by proper configuration of the parent mirror axes in confocal off-axis two-mirror systems. The tilt angle of the image plane is also derived. The developed theory is verified by ray-tracing analysis of an example system.
© 2006 Optical Society of America
OCIS Codes
(080.1010) Geometric optics : Aberrations (global)
(110.3960) Imaging systems : Microlithography
(220.2740) Optical design and fabrication : Geometric optical design
ToC Category:
Optical Design and Fabrication
Citation
Seunghyuk Chang, Jung Hoon Lee, Suk Pil Kim, Hun Kim, Won Joo Kim, Ihun Song, and Youngsoo Park, "Linear astigmatism of confocal off-axis reflective imaging systems and its elimination," Appl. Opt. 45, 484-488 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-3-484
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