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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 45, Iss. 30 — Oct. 20, 2006
  • pp: 7800–7810

Nomarski imaging interferometry to measure the displacement field of micro-electro-mechanical systems

Fabien Amiot and Jean Paul Roger  »View Author Affiliations

Applied Optics, Vol. 45, Issue 30, pp. 7800-7810 (2006)

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We propose to use a Nomarski imaging interferometer to measure the out- of-plane displacement field of micro-electro-mechanical systems. It is shown that the measured optical phase arises from both height and slope gradients. By using four integrating buckets, a more efficient approach to unwrap the measured phase is presented, thus making the method well suited for highly curved objects. Slope and height effects are then decoupled by expanding the displacement field on a functions basis, and the inverse transformation is applied to get a displacement field from a measured optical phase map change with a mechanical loading. A measurement reproducibility of approximately 10 pm is achieved, and typical results are shown on a microcantilever under thermal actuation, thereby proving the ability of such a setup to provide a reliable full-field kinematic measurement without surface modification.

© 2006 Optical Society of America

OCIS Codes
(100.5070) Image processing : Phase retrieval
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(180.3170) Microscopy : Interference microscopy

ToC Category:

Original Manuscript: March 14, 2006
Manuscript Accepted: May 18, 2006

Virtual Issues
Vol. 1, Iss. 11 Virtual Journal for Biomedical Optics

Fabien Amiot and Jean Paul Roger, "Nomarski imaging interferometry to measure the displacement field of micro-electro-mechanical systems," Appl. Opt. 45, 7800-7810 (2006)

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