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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 45, Iss. 30 — Oct. 20, 2006
  • pp: 7851–7857

Deposition and spectral performance of an inhomogeneous broadband wide-angular antireflective coating

V. Janicki, D. Gäbler, S. Wilbrandt, R. Leitel, O. Stenzel, N. Kaiser, M. Lappschies, B. Görtz, D. Ristau, C. Rickers, and M. Vergöhl  »View Author Affiliations


Applied Optics, Vol. 45, Issue 30, pp. 7851-7857 (2006)
http://dx.doi.org/10.1364/AO.45.007851


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Abstract

Gradient index coatings and optical filters are a challenge for fabrication. In a round-robin experiment, basically the same hybrid antireflection coating for the visible spectral region, combining homogeneous refractive index layers of pure materials and linear gradient refractive index layers of material mixtures, has been deposited. The experiment involved three different deposition techniques: electron-beam evaporation, ion-beam sputtering, and radio frequency magnetron sputtering. The material combinations used by these techniques were Nb 2 O 5 / SiO 2 , TiO 2 / SiO 2 , and Ta 2 O 5 / SiO 2 , respectively. The spectral performances of samples coated on one side and on both sides have been compared to the corresponding theoretical spectra of the designed profile. Also, the reproducibility of results for each process is verified. Finally, it is shown that ion-beam sputtering gave the best results in terms of deviation from the theoretical performance and reproducibility.

© 2006 Optical Society of America

OCIS Codes
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication

ToC Category:
Thin Films

History
Original Manuscript: January 3, 2006
Revised Manuscript: May 8, 2006
Manuscript Accepted: June 9, 2006

Citation
V. Janicki, D. Gäbler, S. Wilbrandt, R. Leitel, O. Stenzel, N. Kaiser, M. Lappschies, B. Görtz, D. Ristau, C. Rickers, and M. Vergöhl, "Deposition and spectral performance of an inhomogeneous broadband wide-angular antireflective coating," Appl. Opt. 45, 7851-7857 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-30-7851

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