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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 45, Iss. 30 — Oct. 20, 2006
  • pp: 7863–7870

Statistical approach to choosing a strategy of monochromatic monitoring of optical coating production

A. V. Tikhonravov, M. K. Trubetskov, and T. V. Amotchkina  »View Author Affiliations


Applied Optics, Vol. 45, Issue 30, pp. 7863-7870 (2006)
http://dx.doi.org/10.1364/AO.45.007863


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Abstract

We presents what we believe to be a new approach to choosing a sequence of monitoring wavelengths for monochromatic monitoring of optical coating production. The new approach is based on a preproduction estimation of expected levels of errors in thickness of layers of a deposited coating. It is demonstrated that the proposed monitoring strategy reduces the effect of accumulation of thickness errors. An advantage of the new monitoring strategy becomes especially noticeable when the number of monitored layers is equal to several dozens.

© 2006 Optical Society of America

OCIS Codes
(240.0310) Optics at surfaces : Thin films
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication

ToC Category:
Thin Films

History
Original Manuscript: May 2, 2006
Manuscript Accepted: June 9, 2006

Citation
A. V. Tikhonravov, M. K. Trubetskov, and T. V. Amotchkina, "Statistical approach to choosing a strategy of monochromatic monitoring of optical coating production," Appl. Opt. 45, 7863-7870 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-30-7863

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