Abstract

Cylindrical specimens may be tested advantageously by using grazing-incidence interferometry. A multiple positions test in combination with rotational averaging has recently been used to separate the surface deviations of the specimen from the interferometric aberrations. To reduce the measuring time and to check whether the results are reliable, a second procedure is now investigated, which uses the principle of the multiple positions test to determine quantities proportional to the difference quotients of the surface deviations. After numerical integration, the results can be compared with those obtained previously by rotational averaging. The measurement principle is described, and calibration results are presented.

© 2006 Optical Society of America

Absolute calibration in grazing incidence interferometry via rotational averaging

Klaus Mantel, Jürgen Lamprecht, Norbert Lindlein, and Johannes Schwider
Appl. Opt. 45(16) 3740-3745 (2006)

Compensation for anamorphotic distortion in grazing-incidence interferometry testing planar specimens

Jessica Schneider, Klaus Mantel, Roland Schreiner, Norbert Lindlein, and Johannes Schwider
Appl. Opt. 42(22) 4480-4487 (2003)

Interferometric grazing incidence test of rough steep convex aspherics: full 3D reconstruction of the object

S. Rothau, T. Schamburek, K. Mantel, and N. Lindlein
Appl. Opt. 61(15) 4246-4253 (2022)

Simultaneous characterization of the quality and orientation of cylindrical lens surfaces

Klaus Mantel, Norbert Lindlein, and Johannes Schwider
Appl. Opt. 44(15) 2970-2977 (2005)

Testing of rod objects by grazing incidence interferometry: theory

Thomas Dresel, Sven Brinkmann, Roland Schreiner, and Johannes Schwider
J. Opt. Soc. Am. A 15(11) 2921-2928 (1998)