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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 45, Iss. 31 — Nov. 1, 2006
  • pp: 8013–8018

Calibration for cylindrical specimens in grazing-incidence interferometry via integration of difference measurements

Klaus Mantel, Jürgen Lamprecht, Norbert Lindlein, and Johannes Schwider  »View Author Affiliations

Applied Optics, Vol. 45, Issue 31, pp. 8013-8018 (2006)

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Cylindrical specimens may be tested advantageously by using grazing-incidence interferometry. A multiple positions test in combination with rotational averaging has recently been used to separate the surface deviations of the specimen from the interferometric aberrations. To reduce the measuring time and to check whether the results are reliable, a second procedure is now investigated, which uses the principle of the multiple positions test to determine quantities proportional to the difference quotients of the surface deviations. After numerical integration, the results can be compared with those obtained previously by rotational averaging. The measurement principle is described, and calibration results are presented.

© 2006 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(220.4840) Optical design and fabrication : Testing

Original Manuscript: March 21, 2006
Revised Manuscript: June 13, 2006
Manuscript Accepted: June 23, 2006

Klaus Mantel, Jürgen Lamprecht, Norbert Lindlein, and Johannes Schwider, "Calibration for cylindrical specimens in grazing-incidence interferometry via integration of difference measurements," Appl. Opt. 45, 8013-8018 (2006)

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