A new model for analyzing the laser-induced damage process is provided. In many damage pits, the melted residue can been found. This is evidence of the phase change of materials. Therefore the phase change of materials is incorporated into the mechanical damage mechanism of films. Three sequential stages are discussed: no phase change, liquid phase change, and gas phase change. To study the damage mechanism and process, two kinds of stress have been considered: thermal stress and deformation stress. The former is caused by the temperature gradient and the latter is caused by high-pressure drive deformation. The theory described can determine the size of the damage pit.
© 2006 Optical Society of America
Lasers and Laser Optics
Original Manuscript: January 17, 2006
Revised Manuscript: May 26, 2006
Manuscript Accepted: June 27, 2006
ZhiLin Xia, JianDa Shao, ZhengXiu Fan, and ShiGang Wu, "Thermodynamic damage mechanism of transparent films caused by a low-power laser," Appl. Opt. 45, 8253-8261 (2006)