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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 45, Iss. 32 — Nov. 10, 2006
  • pp: 8253–8261

Thermodynamic damage mechanism of transparent films caused by a low-power laser

ZhiLin Xia, JianDa Shao, ZhengXiu Fan, and ShiGang Wu  »View Author Affiliations


Applied Optics, Vol. 45, Issue 32, pp. 8253-8261 (2006)
http://dx.doi.org/10.1364/AO.45.008253


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Abstract

A new model for analyzing the laser-induced damage process is provided. In many damage pits, the melted residue can been found. This is evidence of the phase change of materials. Therefore the phase change of materials is incorporated into the mechanical damage mechanism of films. Three sequential stages are discussed: no phase change, liquid phase change, and gas phase change. To study the damage mechanism and process, two kinds of stress have been considered: thermal stress and deformation stress. The former is caused by the temperature gradient and the latter is caused by high-pressure drive deformation. The theory described can determine the size of the damage pit.

© 2006 Optical Society of America

OCIS Codes
(140.3330) Lasers and laser optics : Laser damage
(140.3440) Lasers and laser optics : Laser-induced breakdown
(310.3840) Thin films : Materials and process characterization

ToC Category:
Lasers and Laser Optics

History
Original Manuscript: January 17, 2006
Revised Manuscript: May 26, 2006
Manuscript Accepted: June 27, 2006

Citation
ZhiLin Xia, JianDa Shao, ZhengXiu Fan, and ShiGang Wu, "Thermodynamic damage mechanism of transparent films caused by a low-power laser," Appl. Opt. 45, 8253-8261 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-32-8253


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References

  1. B. C. Stuart, M. D. Feit, A. M. Rubenchik, B. W. Shore, and M. D. Perry, "Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses," Phys. Rev. Lett. 74, 2248-2251 (1995). [CrossRef] [PubMed]
  2. D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, "Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs," Appl. Phys. Lett. 64, 3071-3073 (1994). [CrossRef]
  3. R. W. Hopper and D. R. Uhlman, "Mechanism of inclusion damage in laser glass," J. Appl. Phys. 41, 4023-4037 (1970). [CrossRef]
  4. M. Lenzner, "Femtosecond laser-induced damage of dielectrics," Int. J. Mod. Phys. B 13, 1559-1578 (1999). [CrossRef]
  5. M. F. Koldunov, A. A. Manenkov, and L. L. Pokotilo, "Mechanical damage in transparent solids caused by laser pulse of different durations," Quantum Electron. 32, 335-340 (2002). [CrossRef]
  6. M. F. Koldunov, A. A. Manenkov, and I. L. Pokotilo, "Efficiency of various mechanisms of the laser damage in transparent solids," Quantum Electron. 32, 623-628 (2002). [CrossRef]
  7. M. Lezius, S. Dobosz, D. Normand, and M. Schmidt, "Explosion dynamics of rare gas clusters in strong laser fields," Phys. Rev. Lett. 80, 261-264 (1998). [CrossRef]
  8. T. Ditmire, J. W. G. Tisch, E. Springate, M. B. Mason, N. Hay, J. P. Marangos, and M. H. R. Hutchinson, "High energy ion explosion of atomic clusters: transition from molecular to plasma behavior," Phys. Rev. Lett. 78, 2732-2735 (1997). [CrossRef]
  9. P. Mora, "Plasma expansion into a vacuum," Phys. Rev. Lett. 90, 185002 (2003).
  10. N. Bloembergen, "Role of cracks, pores, and absorbing inclusions on laser induced damage threshold at surface of transparent dielectrics," Appl. Opt. 12, 661-664 (1973). [CrossRef] [PubMed]
  11. H. G. Idenberg and C. J. Tranter, "Heat flow in an infinite medium heated by a sphere," Br. J. Appl. Phys. 3, 296-298 (1952). [CrossRef]
  12. Z. Guan and J. P. Lu, "The basic theory of numerical method," in Ke Xu, 1st ed. (Higher Education Press, 1998), p. 226, in Chinese.
  13. Z. Xia, D. Deng, Z. Fan, and J. Shao, "Development in laser induced extrinsic absorption damage mechanism of dielectric films," Chin. Phys. Lett. 23, 2179-2182 (2006). [CrossRef]
  14. X. C. Shen, "The spectrum and optical character of the semiconductor," in DePing Yan, 2nd ed. (Chinese Scientific, 2002), p. 68.
  15. L. V. Keldysh, "Ionization in the field of a strong electromagnetic wave," Sov. Phys. JETP 20, 1307-1314 (1965).
  16. C. W. Sun, L. Q. Sheng, F. Z. Xiu, C. Y. Zhe, L. C. Fu, G. J. Li, and G. C. Wen, Laser Irradiating Effect Ion, 1st ed. (National Defence Industry Press, 2002), p. 93.
  17. M. F. Koldunov, A. A. Manenkov, and I. L. Pokotolo, The Theory of Inclusion Initiated Laser in Optical Materials: The Thermal Explosion Mechanism, Damage in Laser Materials: 1988, NIST special publication 775 (NIST, 1989), pp. 502-515.
  18. T. W. Walker, A. H. Guenther, and P. E. Nielsen, "Pulsed laser-induced damage to thin-film optical coatings--part 1: experimental," IEEE , J. Quantum Electron. QE-17, 2041-2053 (1981). [CrossRef]
  19. T. W. Walker, A. H. Guenther, and P. E. Nielsen, "Pulsed laser-induced damage to thin-film optical coatings--part 2: theory," IEEE J. Quantum Electron. QE-17, 2053-2065 (1981). [CrossRef]
  20. Z. Dongping, "Detection & suppressing of micro-defects in optical coatings and laser-induced damage mechanism," doctoral dissertation (Shanghai Institute of Optics and Fine Mechanics, 2005), in Chinese.
  21. S. Wu, J. Shao, K. Yi, Y. Zhao, and Z. Fan, "Analysis of inclusions in raw materials of HfO2," Rare Metal Mater. Eng. 35,757-760 (2006), in Chinese.
  22. S. S. Cohen, J. B. Bernstein, and P. W. Wyatt, "The effect of multiple lasers on damage to thin metallic films," J. Appl. Phys. 71, 630-637 (1992). [CrossRef]
  23. H. W. Huang, "Spherical Kelvin shell endured seasonal inner pressure," J. Chin. Univ. Geosci. (Earth Sciences edition) 23, 326-328 (1998).
  24. Y.-m. Shen, H.-b. He, S.-y. Shao, Z.-x. Fan, and J.-d. Shao, "Influences of deposition temperature on residual stress of HfO2 films," High Power Laser Particle Beams 17,1812-1816 (2005), in Chinese.
  25. Z.-l. Xia, J.-d. Shao, Z.-x. Fan, and S.-g. Wu, "Formation mechanism of bubbles in the surface of films induced by long pulse width laser," High Power Laser Particle Beams 18,575-579 (2006), in Chinese.

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