Stability of electrostatic actuated membrane mirror devices
Applied Optics, Vol. 45, Issue 32, pp. 8288-8297 (2006)
http://dx.doi.org/10.1364/AO.45.008288
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Abstract
Membrane mirrors with transparent electrodes were fabricated for adaptive optics. These devices are capable of generating large, low-spatial-order deformations but exhibit instability for high-order deformations. A variational calculation of the electrostatic and mechanical energy of such membrane devices leads to criteria for stable operation. Simulations based upon this calculation are able to reproduce the observed behavior of fabricated devices and suggest suitable device parameters for improved performance with high-order deformations.
© 2006 Optical Society of America
OCIS Codes
(010.1080) Atmospheric and oceanic optics : Active or adaptive optics
(010.1290) Atmospheric and oceanic optics : Atmospheric optics
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(130.5990) Integrated optics : Semiconductors
(170.4460) Medical optics and biotechnology : Ophthalmic optics and devices
(230.6120) Optical devices : Spatial light modulators
ToC Category:
Optical Devices
History
Original Manuscript: March 16, 2006
Revised Manuscript: July 5, 2006
Manuscript Accepted: July 16, 2006
Virtual Issues
Vol. 1, Iss. 12 Virtual Journal for Biomedical Optics
Citation
Peter Kurczynski, Harold M. Dyson, and Bernard Sadoulet, "Stability of electrostatic actuated membrane mirror devices," Appl. Opt. 45, 8288-8297 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-32-8288
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