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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 45, Iss. 32 — Nov. 10, 2006
  • pp: 8288–8297

Stability of electrostatic actuated membrane mirror devices

Peter Kurczynski, Harold M. Dyson, and Bernard Sadoulet  »View Author Affiliations

Applied Optics, Vol. 45, Issue 32, pp. 8288-8297 (2006)

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Membrane mirrors with transparent electrodes were fabricated for adaptive optics. These devices are capable of generating large, low-spatial-order deformations but exhibit instability for high-order deformations. A variational calculation of the electrostatic and mechanical energy of such membrane devices leads to criteria for stable operation. Simulations based upon this calculation are able to reproduce the observed behavior of fabricated devices and suggest suitable device parameters for improved performance with high-order deformations.

© 2006 Optical Society of America

OCIS Codes
(010.1080) Atmospheric and oceanic optics : Active or adaptive optics
(010.1290) Atmospheric and oceanic optics : Atmospheric optics
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(130.5990) Integrated optics : Semiconductors
(170.4460) Medical optics and biotechnology : Ophthalmic optics and devices
(230.6120) Optical devices : Spatial light modulators

ToC Category:
Optical Devices

Original Manuscript: March 16, 2006
Revised Manuscript: July 5, 2006
Manuscript Accepted: July 16, 2006

Virtual Issues
Vol. 1, Iss. 12 Virtual Journal for Biomedical Optics

Peter Kurczynski, Harold M. Dyson, and Bernard Sadoulet, "Stability of electrostatic actuated membrane mirror devices," Appl. Opt. 45, 8288-8297 (2006)

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  3. We are preparing a manuscript to be called, "Fabrication of a membrane mirror with transparent electrode."
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