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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 45, Iss. 35 — Dec. 10, 2006
  • pp: 8882–8888

High-efficiency collector design for extreme-ultraviolet and x-ray applications

Fabio E. Zocchi  »View Author Affiliations


Applied Optics, Vol. 45, Issue 35, pp. 8882-8888 (2006)
http://dx.doi.org/10.1364/AO.45.008882


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Abstract

A design of a two-reflection mirror for nested grazing-incidence optics is proposed in which maximum overall reflectivity is achieved by making the two grazing-incidence angles equal for each ray. The design is proposed mainly for application to nonimaging collector optics for extreme-ultraviolet microlithography where the radiation emitted from a hot plasma source needs to be collected and focused on the illuminator optics. For completeness, the design of a double- reflection mirror with equal reflection angles is also briefly outlined for the case of an object at infinity for possible use in x-ray applications.

© 2006 Optical Society of America

OCIS Codes
(080.2740) Geometric optics : Geometric optical design
(110.3960) Imaging systems : Microlithography
(220.4830) Optical design and fabrication : Systems design
(340.7470) X-ray optics : X-ray mirrors

History
Original Manuscript: May 18, 2006
Revised Manuscript: July 31, 2006
Manuscript Accepted: July 31, 2006

Citation
Fabio E. Zocchi, "High-efficiency collector design for extreme-ultraviolet and x-ray applications," Appl. Opt. 45, 8882-8888 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-35-8882


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