We demonstrate the use of digital holographic microscopy (DHM) as a metrological tool in micro-optics testing. Measurement principles are compared with those performed with Twyman–Green, Mach–Zehnder, and white-light interferometers. Measurements performed on refractive microlenses with reflection DHM are compared with measurements performed with standard interferometers. Key features of DHM such as digital focusing, measurement of shape differences with respect to a perfect model, surface roughness measurements, and optical performance evaluation are discussed. The capability of imaging nonspherical lenses without any modification of the optomechanical setup is a key advantage of DHM compared with conventional measurement tools and is demonstrated on a cylindrical microlens and a square lens array.
© 2006 Optical Society of America
Digital/Electronic Holographic Microscopy
Original Manuscript: May 13, 2005
Revised Manuscript: August 8, 2005
Manuscript Accepted: August 8, 2005
Florian Charrière, Jonas Kühn, Tristan Colomb, Frédéric Montfort, Etienne Cuche, Yves Emery, Kenneth Weible, Pierre Marquet, and Christian Depeursinge, "Characterization of microlenses by digital holographic microscopy," Appl. Opt. 45, 829-835 (2006)