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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 45, Iss. 6 — Feb. 20, 2006
  • pp: 1124–1133

Error analysis of the phase-shifting technique when applied to shadow moiré

Changwoon Han and Bongtae Han  »View Author Affiliations

Applied Optics, Vol. 45, Issue 6, pp. 1124-1133 (2006)

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An exact solution for the intensity distribution of shadow moiré fringes produced by a broad spectrum light is presented. A mathematical study quantifies errors in fractional fringe orders determined by the phase-shifting technique, and its validity is corroborated experimentally. The errors vary cyclically as the distance between the reference grating and the specimen increases. The amplitude of the maximum error is approximately 0.017 fringe, which defines the theoretical limit of resolution enhancement offered by the phase-shifting technique.

© 2006 Optical Society of America

OCIS Codes
(050.5080) Diffraction and gratings : Phase shift
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.4120) Instrumentation, measurement, and metrology : Moire' techniques

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: August 25, 2005
Revised Manuscript: October 25, 2005
Manuscript Accepted: October 29, 2005

Changwoon Han and Bongtae Han, "Error analysis of the phase-shifting technique when applied to shadow moiré," Appl. Opt. 45, 1124-1133 (2006)

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