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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 45, Iss. 7 — Mar. 1, 2006
  • pp: 1333–1337

Rugate filter made with composite thin films by ion-beam sputtering

Cheng-Chung Lee, Chien-Jen Tang, and Jean-Yee Wu  »View Author Affiliations


Applied Optics, Vol. 45, Issue 7, pp. 1333-1337 (2006)
http://dx.doi.org/10.1364/AO.45.001333


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Abstract

Composite films of Ta–Si oxide with refractive indices that varied from 1.48 to 2.15 were realized by using rf ion-beam sputtering. All the composite films were amorphous and had a surface roughness of less than 0.3 nm . The inhomogeneity of the composite was discussed, and a rugate filter was designed and fabricated by automatic computer control.

© 2006 Optical Society of America

OCIS Codes
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication

ToC Category:
Filters

History
Original Manuscript: February 28, 2005
Revised Manuscript: July 27, 2005
Manuscript Accepted: August 13, 2005

Citation
Cheng-Chung Lee, Chien-Jen Tang, and Jean-Yee Wu, "Rugate filter made with composite thin films by ion-beam sputtering," Appl. Opt. 45, 1333-1337 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-7-1333

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