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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 45, Iss. 7 — Mar. 1, 2006
  • pp: 1333–1337

Rugate filter made with composite thin films by ion-beam sputtering

Cheng-Chung Lee, Chien-Jen Tang, and Jean-Yee Wu  »View Author Affiliations

Applied Optics, Vol. 45, Issue 7, pp. 1333-1337 (2006)

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Composite films of Ta–Si oxide with refractive indices that varied from 1.48 to 2.15 were realized by using rf ion-beam sputtering. All the composite films were amorphous and had a surface roughness of less than 0.3 nm . The inhomogeneity of the composite was discussed, and a rugate filter was designed and fabricated by automatic computer control.

© 2006 Optical Society of America

OCIS Codes
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication

ToC Category:

Original Manuscript: February 28, 2005
Revised Manuscript: July 27, 2005
Manuscript Accepted: August 13, 2005

Cheng-Chung Lee, Chien-Jen Tang, and Jean-Yee Wu, "Rugate filter made with composite thin films by ion-beam sputtering," Appl. Opt. 45, 1333-1337 (2006)

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  1. E. P. Donovan, D. Van Vechten, A. D. F. Kahn, C. A. Carosella, and G. K. Hubler, 'Near infrared rugate filter fabrication by ion beam assisted deposition of Si(1-x)Nx films,' Appl. Opt. 28, 2940-2944 (1989). [CrossRef] [PubMed]
  2. W. J. Gunning, R. L. Hall, F. J. Woodberry, W. H. Southwell, and N. S. Gluck, 'Codeposition of continuous composition rugate filters,' Appl. Opt. 28, 2945-2948 (1989). [CrossRef] [PubMed]
  3. H. J. Cho, I. G. Yu, and C. K. Hwangbo, 'Inhomogeneous optical SiOxNy thin films prepared by ion assisted deposition,' Nucl. Instrum. Methods Phys. Res. B 121, 137-140 (1997). [CrossRef]
  4. H. Bartzsch, S. Lange, P. Frach, and K. Goedicke, 'Graded refractive index layer systems for antireflective coatings and rugate filters deposited by reactive pulse magnetron sputtering,' Surf. Coat. Technol. 180-181, 616-620 (2004). [CrossRef]
  5. A. Feldman, E. N. Farabaugh, W. K. Haller, D. M. Sanders, and R. A. Stempniak, 'Modifying structure and properties of optical films by coevaporation,' J. Vac. Sci. Technol. A 6, 2969-2974 (1986). [CrossRef]
  6. H. Sankur, W. J. Gunning, and J. F. DeNatale, 'Intrinsic stress and structural properties of mixed composition thin film,' Appl. Opt. 27, 1564-1567 (1988). [CrossRef] [PubMed]
  7. J. S. Chen, S. Chao, J. S. Kao, H. Niu, and C. H. Chen, 'Mixed films of TiO2-SiO2 deposited by double electron-beam coevaporation,' Appl. Opt. 37, 90-96 (1996). [CrossRef]
  8. N. K. Sahoo and A. P. Shapiro, 'Process-parameter-dependent optical and structural properties of ZrO2MgO mixed-composite films evaporated from the solid solution,' Appl. Opt. 37, 698-718 (1998). [CrossRef]
  9. T. U. Ryu, S. H. Hahn, S. W. Kim, and E. J. Kim, 'Optical, mechanical and thermal properties of MgF2-ZnS and MgF2-Ta2O5 composite thin films deposited by co-evaporation,' Opt. Eng. 39, 3207-3213 (2000). [CrossRef]
  10. B. J. Pond, J. I. DeBar, C. K. Carniglia, and T. Raj, 'Stress reduction in ion beam sputtered mixed oxide films,' Appl. Opt. 28, 2800-2805 (1989). [CrossRef] [PubMed]
  11. S. Chao, C. K. Chang, and J. S. Chen, 'TiO2-SiO2 mixed films prepared by the fast alternating sputter method,' Appl. Opt. 30, 3233-3237 (1991). [CrossRef] [PubMed]
  12. M. Veszelei, L. Kullman, C. G. Granqvist, N. von Rottkay, and M. Rubin, 'Optical constants of sputter-deposited Ti-Ce oxide and Zr-Ce oxide films,' Appl. Opt. 37, 5993-6001 (1998). [CrossRef]
  13. X. Wang, H. Masumoto, Y. Someno, and T. Hirai, 'Microstructure and optical properties of amorphous TiO2-SiO2 composite films synthesized by helicon plasma sputtering,' Thin Solid Films 338, 105-109 (1999). [CrossRef]
  14. A. Ritz, 'TaTiOx layers prepared by magnetron sputtering from separate metal targets,' Surf. Coat. Technol. 174-175, 651-654 (2003). [CrossRef]
  15. M. Cevro, 'Ion-beam sputtering of (Ta2O5)x-(SiO2)1-x composite thin films,' Thin Solid Films 258, 91-103 (1995). [CrossRef]
  16. S. Chao, W. H. Wang, and C. C. Lee, 'Low-loss dielectric mirror with ion-beam-sputtered TiO2-SiO2 mixed films,' Appl. Opt. 40, 2177-2182 (2001). [CrossRef]
  17. Y. Katagiri and H. Ukita, 'Ion beam sputtered (SiO2)x(Si3N4)1-x antireflection coatings on laser facets produced using O2-N2 discharges,' Appl. Opt. 29, 5074-5079 (1990). [CrossRef] [PubMed]
  18. C. C. Lee, H. L. Chen, J. C. Hsu, and C. L. Tien, 'Interference coating base on synthesized silicon nitride,' Appl. Opt. 38, 2078-2082 (1999). [CrossRef]
  19. J. C. Manifacier, J. Gasiot, and J. P. Fillard, 'A simple method for the determination of the optical constant n, k and the thickness of the weakly absorbing thin film,' J. Phys. E 9, 1002-1004 (1976). [CrossRef]
  20. W. H. Southwell, 'Spectral response calculations of rugate filters using coupled-wave theory,' J. Opt. Soc. Am. A 5, 1558-1564 (1988). [CrossRef]
  21. W. H. Southwell, 'Rugate filter sidelobe suppression using quintic and rugated quintic matching layers,' Appl. Opt. 28, 2949-2951 (1989). [CrossRef] [PubMed]
  22. W. H. Southwell, 'Using apodization functions to reduce sidelobes in rugate filters,' Appl. Opt. 28, 5091-5094 (1989). [CrossRef] [PubMed]

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