Ultra-low-stress thin-film interference filters

Georg J. Ockenfuss; Robert E. Klinger

doi:10.1364/AO.45.001364

Applied Optics
Vol. 45,
Issue 7,
pp. 1364-1367
(2006)
•https://doi.org/10.1364/AO.45.001364

Ultra-low-stress thin-film interference filters

Georg J. Ockenfuss and Robert E. Klinger

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Georg J. Ockenfuss and Robert E. Klinger, "Ultra-low-stress thin-film interference filters," Appl. Opt. 45, 1364-1367 (2006)

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Abstract

A method to reduce the optical degrading effect of coating stress in a thin-film filter by releasing the filter from the substrate on which it was deposited is described. An extremely challenging 8-skip-0 $100 GHz$ wavelength-division-multiplexing band-splitting filter is demonstrated.

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Design	RBW^a (GHz)		Shape Factor^b	No. of Cavities	Physical Thickness $(µm)$
Design	$- 0.3 dB$	$- 20 dB$	Shape Factor^b	No. of Cavities	Physical Thickness $(µm)$
4-skip-1 $100 GHz$	325	670	2.06	8	49
4-skip-0 $100 GHz$	325	470	1.44	10	62
8-skip-0 $100 GHz$	725	870	1.20	17	94

Characteristic	Filter	Coupler
Passband width at $- 0.3 dB$	$778 GHz$	$771 GHz$
Block bandwidth at $- 20 dB$	$838 GHz$	$837 GHz$
Reflection isolation	$> 15 dB$	$> 15 dB$
PDL^a	Not measured	$< 0.1 dB$
CD^b	Not measured	$\pm - 30 ps / nm$
Shape factor	1.071	1.085

Design	RBW^a (GHz)		Shape Factor^b	No. of Cavities	Physical Thickness $(µm)$
Design	$- 0.3 dB$	$- 20 dB$	Shape Factor^b	No. of Cavities	Physical Thickness $(µm)$
4-skip-1 $100 GHz$	325	670	2.06	8	49
4-skip-0 $100 GHz$	325	470	1.44	10	62
8-skip-0 $100 GHz$	725	870	1.20	17	94

Characteristic	Filter	Coupler
Passband width at $- 0.3 dB$	$778 GHz$	$771 GHz$
Block bandwidth at $- 20 dB$	$838 GHz$	$837 GHz$
Reflection isolation	$> 15 dB$	$> 15 dB$
PDL^a	Not measured	$< 0.1 dB$
CD^b	Not measured	$\pm - 30 ps / nm$
Shape factor	1.071	1.085

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Applied Optics