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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 45, Iss. 7 — Mar. 1, 2006
  • pp: 1392–1396

Characterization of thin films based on reflectance and transmittance measurements at oblique angles of incidence

Antti Lamminpää, Saulius Nevas, Farshid Manoocheri, and Erkki Ikonen  »View Author Affiliations

Applied Optics, Vol. 45, Issue 7, pp. 1392-1396 (2006)

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The optical parameters of a SiO 2 thin-film coating determined from the spectral reflectance and transmittance measurements at various incidence angles, including the normal incidence and the Brewster's angle, are compared in this paper. The high-accuracy measurements were carried out through visible–near-infrared spectral regions by using our purpose-built instruments. The optical parameters obtained from the reflectance and the transmittance data are consistent over the angles of incidence and agree within 0.2%. The effect of important systematic factors in the oblique-incidence spectrophotometric measurements is also discussed.

© 2006 Optical Society of America

OCIS Codes
(120.5700) Instrumentation, measurement, and metrology : Reflection
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation
(120.7000) Instrumentation, measurement, and metrology : Transmission
(260.5430) Physical optics : Polarization
(310.1620) Thin films : Interference coatings
(310.3840) Thin films : Materials and process characterization

ToC Category:
Characterization of Optical Coatings

Original Manuscript: March 1, 2005
Revised Manuscript: July 7, 2005
Manuscript Accepted: July 7, 2005

Antti Lamminpää, Saulius Nevas, Farshid Manoocheri, and Erkki Ikonen, "Characterization of thin films based on reflectance and transmittance measurements at oblique angles of incidence," Appl. Opt. 45, 1392-1396 (2006)

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