Angle-resolved light scattering has been used for decades to quantify the surface roughness of optical components. However, because this technique is affected by the contribution of both interfaces of the sample, it cannot be applied to transparent substrates. We show how to overcome this issue and apply these principles to the characterization of superpolished samples.
© 2006 Optical Society of America
Characterization of Optical Coatings
Original Manuscript: March 1, 2005
Revised Manuscript: July 25, 2005
Manuscript Accepted: August 13, 2005
Myriam Zerrad, Carole Deumié, Michel Lequime, Claude Amra, and Mike Ewart, "Light-scattering characterization of transparent substrates," Appl. Opt. 45, 1402-1409 (2006)