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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 45, Iss. 7 — Mar. 1, 2006
  • pp: 1402–1409

Light-scattering characterization of transparent substrates

Myriam Zerrad, Carole Deumié, Michel Lequime, Claude Amra, and Mike Ewart  »View Author Affiliations


Applied Optics, Vol. 45, Issue 7, pp. 1402-1409 (2006)
http://dx.doi.org/10.1364/AO.45.001402


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Abstract

Angle-resolved light scattering has been used for decades to quantify the surface roughness of optical components. However, because this technique is affected by the contribution of both interfaces of the sample, it cannot be applied to transparent substrates. We show how to overcome this issue and apply these principles to the characterization of superpolished samples.

© 2006 Optical Society of America

OCIS Codes
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness

ToC Category:
Characterization of Optical Coatings

History
Original Manuscript: March 1, 2005
Revised Manuscript: July 25, 2005
Manuscript Accepted: August 13, 2005

Citation
Myriam Zerrad, Carole Deumié, Michel Lequime, Claude Amra, and Mike Ewart, "Light-scattering characterization of transparent substrates," Appl. Opt. 45, 1402-1409 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-7-1402


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References

  1. C. Amra, 'Light scattering from multilayer optics. Part A: Investigation tools,' J. Opt. Soc. Am. A 11, 197-210 (1994).
  2. C. Amra, 'Light scattering from multilayer optics. Part B: Application to experiment,' J. Opt. Soc. Am. A 11, 211-226 (1994).
  3. J. M. Bennet and L. Mattsson, Introduction to Surface Roughness and Scattering (Optical Society of America, 1989).
  4. L. Bruel, 'Etude comparative de méthodes optiques et mécanique pour caractériser les états de surface. Diffusion de la lumière par les rugosités de surface et inhomogénéités de volume dans les empilements de couches minces,' Ph.D. dissertation(Univ Aix-Marseille III, Marseille, France, 1992).
  5. P. Croce and L. Prod'homme, 'Ecarts observés dans l'interprétation des indicatrices de diffusion optique par des théories vectorielles simples,' J. Opt., (Paris) 16, 143-1511985.
  6. J. M. Elson, J. P. Rhan, and J. M. Bennet, 'Relationship of the total integrated scattering from multilayer-coated optics to angle of incidence, polarization, correlation-length, and roughness cross-correlation properties,' Appl. Opt. 22, 3207-3219 (1983). [PubMed]
  7. A. Sentenac and J. J. Greffet, 'Mean-field theory of light scattering by one-dimensional rough surfaces,' J. Opt. Soc. Am. A 15, 528-532 (1998).
  8. A. Sentenac, J. J. Greffet, H. Giovannini, and M. Saillard, 'Scattering from rough inhomogeneous media: splitting of surface and volume scattering,' J. Opt. Soc. Am. A 19, 727-736 (2002).
  9. P. Vincent, 'Differential method,' in Electromagnetic Theory of Gratings, Vol. 22 of Topics in Current Physics (Springer-Verlag, 1980), pp. 101-121. [CrossRef]
  10. A. G. Voronovitch, 'Small slope approximation in wave scattering from rough surfaces,' Sov. Phys. JETP 1, 65-70 (1985).
  11. D. Torricini and C. Amra, 'Light scattering to characterize both faces of transparent substrates: embedded and radiative transfer,' in Optical Interference CoatingsProc. SPIE 2253, 1117-1130 (1994).
  12. M. Zerrad, C. Deumié, and M. Lequime, 'Diffusion de la lumière par des substrats transparents: caractérisation d'états de surfaces,' poster presented at the Horizons de l'Optique, Toulouse, France, 3-5September 2003.
  13. C. Amra, 'First order vector theory of bulk scattering in optical multilayers,' J. Opt. Soc. Am. A 10, 365-374 (1993).
  14. C. Amra, D. Torricini, and P. Roche, 'Multiwavelength (0.45-10.6 µm) angle-resolved scatterometer or how to extend the optical window,' Appl. Opt. 32, 5462-5474 (1993). [PubMed]
  15. C. Deumié, 'Ellipsométrie sur champ diffus et analyse multi-échelle de la microstructure des multicouches optiques: diffusion lumineuse, microscopie à force atomique, microscopie à effet tunnel optique,' Ph.D. dissertation(Université Aix-Marseille III, Marseille, France, 1997).
  16. C. Deumié, R. Richier, P. Dumas, and C. Amra, 'Multiscale roughness in optical multilayers: atomic force microscopy and light scattering,' Appl. Opt. 35, 5583-5594 (1996). [PubMed]
  17. D. Torricini and C. Amra, 'Light scattering to characterize both faces of transparent substrates: radiative and embedded light,' in Optical Interference CoatingsProc. SPIE 2253, 1117-1130 (1994).
  18. P. Dumas, B. Bouffakhredine, C. Amra, O. Vatel, E. André, R. Galindo, and F. Salvan, 'Quantitative microroughness using near field microscopies and optical,' Europhys. Lett. 22, 717-722 (1993).
  19. C. Amra, C. Deumié, D. Torricini, P. Roche, and R. Galindo, 'Overlapping of roughness spectra measured in macroscopic (optical) and microscopic (AFM) bandwidths,' in Optical Interference Coatings,Proc. SPIE 2253, 614-630 (1994).

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