Double optical monitoring of dip coating with a time-varying refractive index
Applied Optics, Vol. 45, Issue 7, pp. 1491-1494 (2006)
http://dx.doi.org/10.1364/AO.45.001491
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Abstract
A brief overview of optical monitoring for vacuum and wet-bench film-deposition processes is presented. Interferometric and polarimetric measurements are combined with regard to simultaneous monitoring of refractive index and physical thickness in real time. Monitoring stability and accuracy are verified during dip coating with a transparent oil standard. This double optical technique is applied to dip coating with a multicomponent zirconyl chloride aqueous solution, whose resulting temporal refractive-index and physical-thickness curves indicate good reproducibility as well as significant sensitivity to changes of film-flow properties during the dip-coating process.
© 2006 Optical Society of America
OCIS Codes
(260.2130) Physical optics : Ellipsometry and polarimetry
(260.3160) Physical optics : Interference
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties
ToC Category:
Monitoring
History
Original Manuscript: March 4, 2005
Manuscript Accepted: August 13, 2005
Citation
Alexandre F. Michels, Thiago Menegotto, Hans Peter H. Grieneisen, Maurício B. Susin, and Flavio Horowitz, "Double optical monitoring of dip coating with a time-varying refractive index," Appl. Opt. 45, 1491-1494 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-7-1491
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