This contribution is focused on applications of spectroscopic methods for the precise control of deposition processes. Besides a monochromator system with a moving grating for the deep ultraviolet∕vacuum ultraviolet (DUV∕VUV) spectral range, two approaches are presented for online spectrophotometers with CCD arrays. The conventional spectrophotometer is considered for the operator-assisted deposition of fluoride coatings applied in the DUV∕VUV range. The concepts with CCD arrays are combined with an advanced software tool for an automatic production of optical coatings. An ion-assisted deposition process and ion-beam sputtering are considered for rapid manufacturing of complex layer systems in the visible and near-infrared spectral ranges. The present contribution summarizes and discusses the major aspects of the described combinations.
© 2006 Optical Society of America
Original Manuscript: March 22, 2005
Manuscript Accepted: June 30, 2005
Detlev Ristau, Henrik Ehlers, Tobias Gross, and Marc Lappschies, "Optical broadband monitoring of conventional and ion processes," Appl. Opt. 45, 1495-1501 (2006)