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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 45, Iss. 7 — Mar. 1, 2006
  • pp: 1602–1607

High-performance coatings for micromechanical mirrors

Alexandre Gatto, Minghong Yang, Norbert Kaiser, Jörg Heber, Jan Uwe Schmidt, Thilo Sandner, Harald Schenk, and Hubert Lakner  »View Author Affiliations

Applied Optics, Vol. 45, Issue 7, pp. 1602-1607 (2006)

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High-performance coatings for micromechanical mirrors were developed. The high-reflective metal systems can be integrated into the technology of MOEMS, such as spatial light modulators and microscanning mirrors from the near-infrared down to the vacuum-ultraviolet spectral regions. The reported metal designs permit high optical performances to be merged with suitable mechanical properties and fitting complementary metal-oxide semiconductor compatibility.

© 2006 Optical Society of America

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(230.3990) Optical devices : Micro-optical devices
(230.6120) Optical devices : Spatial light modulators
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Stability of Coatings

Original Manuscript: March 2, 2005
Revised Manuscript: August 17, 2005
Manuscript Accepted: August 24, 2005

Alexandre Gatto, Minghong Yang, Norbert Kaiser, Jörg Heber, Jan Uwe Schmidt, Thilo Sandner, Harald Schenk, and Hubert Lakner, "High-performance coatings for micromechanical mirrors," Appl. Opt. 45, 1602-1607 (2006)

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  1. U. Ljungblad, U. Dauderstädt, P. Dürr, T. Sandström, H. Buhre, and H. Lakner, 'New laser pattern generator for DUV using spatial light modulator,' Microelectron. Eng. 57-58, 23-29 (2001). [CrossRef]
  2. T. Sandström, U. B. Ljungblad, P. Dürr, and H. Lakner, 'High-performance laser pattern generation using spatial light modulators (SLM) and deep-UV radiation, inEmerging Lithographic Technologies V, E. A. Dobisz and R. L. Engelstad,eds. Proc. SPIE 4343, 35-45 (2001).
  3. R. Thielsch, 'Optical coatings for the DUV/VUV,' in Interference Coatings, N. Kaiser and H. K. Pulker, eds., Vol. 88 of Springer Series in Optical Sciences (Springer, 2003), pp. 257-279.
  4. J. Heber, A. Gatto, and N. Kaiser, 'Spectrophotometer in the vacuum UV,' in Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization, G. J. Exarhos, A. H. Guenther, N. Kaiser, K. L. Lewis, M. J. Soileau, C. J. Stolz, A. Giesen, and H. Weber, eds., SPIE 4932, 544-548 (2002). [CrossRef]

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