Ellipsometry of reflected and scattered fields for the analysis of substrate optical quality
Applied Optics, Vol. 45, Issue 7, pp. 1640-1649 (2006)
http://dx.doi.org/10.1364/AO.45.001640
Enhanced HTML 
Acrobat PDF (1335 KB)
Abstract
Specular ellipsometry is a well-known and efficient technique to characterize surfaces and coatings. This technique has been extended to the measurement of scattered light. We present an experimental setup, using a polarization modulator, which permits us to characterize transition layers and roughness without a calibration procedure. Experimental results are presented concerning transition layers for damage threshold applications and for rough surfaces or bulks.
© 2006 Optical Society of America
OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(240.0240) Optics at surfaces : Optics at surfaces
(240.5770) Optics at surfaces : Roughness
ToC Category:
Optical Interference Coatings
History
Original Manuscript: March 2, 2005
Revised Manuscript: July 25, 2005
Manuscript Accepted: August 13, 2005
Citation
Carole Deumié, Oliver Gilbert, Gaelle Georges, Laurent Arnaud, and Claude Amra, "Ellipsometry of reflected and scattered fields for the analysis of substrate optical quality," Appl. Opt. 45, 1640-1649 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-7-1640
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Topograph for Inspection of Engine Cylinder Walls (AO)
- Optical Technique for the Automatic Detection and Measurement of Surface Defects on Thin Metallic Wires (AO)
- Angle-resolved ellipsometry of scattering patterns from arbitrary surfaces and bulks (OE)
- Elimination of polarized light scattered by surface roughness or bulk heterogeneity (OE)
- Novel perspectives for the application of total internal reflection microscopy (OE)
Related Conference Papers
- Near field observation of a refractive index grating and a topographical grating by an optically-trapped gold particle
- Light scattering in optical multilayers: review and progress
- Light scattering characterization of superpolished transparent substrates
- Angular phase measurements of polarized scattering from arbitrary surfaces and bulks
- Instrument for Close-to-Process Light Scatter Measurements of Thin Film Coatings and Substrates
« Previous Article | Next Article »
OSA is a member of 