Near-normal-incidence extreme-ultraviolet efficiency of a flat crystalline anisotropically etched blazed grating
Applied Optics, Vol. 45, Issue 8, pp. 1676-1679 (2006)
http://dx.doi.org/10.1364/AO.45.001676
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Abstract
We have measured the extreme-ultraviolet (EUV) efficiency at an angle of incidence of 10° of a flat crystalline anisotropically etched blazed grating. The measured efficiencies are high for uncoated gratings and agree well with a calculated model derived from a reasonable estimate of the groove profile. The highest groove efficiencies derived from the measurements are 48.8% at
© 2006 Optical Society of America
OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.5700) Instrumentation, measurement, and metrology : Reflection
ToC Category:
Diffraction and Gratings
History
Original Manuscript: May 13, 2005
Revised Manuscript: September 13, 2005
Manuscript Accepted: September 21, 2005
Citation
Michael P. Kowalski, Ralf K. Heilmann, Mark L. Schattenburg, Chih-Hao Chang, Frederick B. Berendse, and William R. Hunter, "Near-normal-incidence extreme-ultraviolet efficiency of a flat crystalline anisotropically etched blazed grating," Appl. Opt. 45, 1676-1679 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-8-1676
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