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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 45, Iss. 8 — Mar. 10, 2006
  • pp: 1676–1679

Near-normal-incidence extreme-ultraviolet efficiency of a flat crystalline anisotropically etched blazed grating

Michael P. Kowalski, Ralf K. Heilmann, Mark L. Schattenburg, Chih-Hao Chang, Frederick B. Berendse, and William R. Hunter  »View Author Affiliations


Applied Optics, Vol. 45, Issue 8, pp. 1676-1679 (2006)
http://dx.doi.org/10.1364/AO.45.001676


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Abstract

We have measured the extreme-ultraviolet (EUV) efficiency at an angle of incidence of 10° of a flat crystalline anisotropically etched blazed grating. The measured efficiencies are high for uncoated gratings and agree well with a calculated model derived from a reasonable estimate of the groove profile. The highest groove efficiencies derived from the measurements are 48.8% at 19.07 nm and 64.1% at 16.53 nm for the 2 and 3 orders, respectively, which are comparable to the best values obtained yet from a holographic ion-etched blazed grating. This presents opportunities to instrument designs for high-resolution EUV spectroscopy in astrophysics where high efficiency in high orders is desirable.

© 2006 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.5700) Instrumentation, measurement, and metrology : Reflection

ToC Category:
Diffraction and Gratings

History
Original Manuscript: May 13, 2005
Revised Manuscript: September 13, 2005
Manuscript Accepted: September 21, 2005

Citation
Michael P. Kowalski, Ralf K. Heilmann, Mark L. Schattenburg, Chih-Hao Chang, Frederick B. Berendse, and William R. Hunter, "Near-normal-incidence extreme-ultraviolet efficiency of a flat crystalline anisotropically etched blazed grating," Appl. Opt. 45, 1676-1679 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-8-1676

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